US 5,707,476 A · Method for forming multiple cavity products

Abstract

The present invention relates generally to a new apparatus and method for simultaneously laminating a plurality of substrates having at least one cavity. More particularly, the invention encompasses apparatus and method for fabricating cavities in MLC (multi-layer ceramic). A membrane with or without an opening is placed on the top surface of the unlaminated green sheet having at least one cavity and then standard pressure is applied to laminate the green sheets, while simultaneously a counter pressure is applied in the cavity to prevent the cavity from deforming or collapsing. This is done to simultaneously form a plurality of cavity substrates.

Claims24

Dependent claims

A method of laminating a plurality of ceramic substrates having at least one cavity, comprising the steps of:

(a) placing at least one ceramic layer having at least one cavity over a first plate,
(b) placing at least one cavity forming membrane over at least a portion of said at least one cavity,
(c) placing a first porous plate adjacent at least a portion of said at least one cavity forming membrane, wherein said first porous plate has pores for fluid passage,
(d) putting pressure on at least a portion of said first porous plate so that said first plate and said first porous plate comes closer, and simultaneously pressurizing through said at least one cavity forming membrane said at least one cavity in said ceramic layer with at least one fluid to counter the pressure from said first porous plate, thereby laminating said substrate with at least one cavity.

1 more element

Dependencies are inferred from the claim text.

Method for forming multiple cavity products

Life of this patent

Method for forming multiple cavity products

Life of this patent

Abstract

Claims24