Back to results
US 5,707,447 AGranted
Crystal pulling apparatus
AssigneeBalzers und Leybold Deutschland Holding AG
InventorsWinfried Schulmann, Johann Scholler
Life of this patent
Estimating the term…
Abstract
A crystal pulling apparatus for producing a crystal boule (17) from a material melted in a crucible (4) has, in a tank (1), a heater (5) surrounding the crucible (4). The tank (1) has in the area of the crucible (4) an annular chamber (8) defined on the heater (5) side by an inner protective wall (6) and connected to the shielding gas outlet (14, 15), and on the outside by an outer protective wall (7) behind which the thermal insulation (10) of the tank (1) is located.
Claims4
A crystal pulling apparatus for producing a crystal boule from a melted material, said apparatus comprising
- a crucible for containing said melted material,
- a heater surrounding said crucible,
- a tank in which said crucible and said heater are located, said tank being provided with thermal insulation and cooling passages externally of said insulation, and provided with thermal insulation and cooling passages externally of said insulation, and an annular chamber between said heater and said insulation, said chamber being defined by an inner wall adjacent to said heater and an outer wall adjacent to said insulation, and
- at least one shielding gas outlet connected to said annular chamber.
1 more element
Dependencies are inferred from the claim text.