Device for producing SiC single crystals
AssigneeSiemens Aktiengesellschaft
InventorsJohannes Volkl, Peter Lanig
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AssigneeSiemens Aktiengesellschaft
InventorsJohannes Volkl, Peter Lanig
Estimating the term…
SiC single crystals are produced in a reaction chamber, in which there is a seed crystal for the separation of a SiC single crystal from the gas phase. The reaction chamber is connected to a storage chamber, which is at least partly filled with a supply of SiC, by a gas channel with a predetermined cross-section for conveying the SiC in the gas phase. The supply of SiC is sublimated in a heating device and a temperature gradient is adjusted in the reaction chamber. It is, thus, possible to produce SiC single crystals with any desired cross-sectional area and of high crystalline quality and single-crystal yield, because the conveyance rate of the gas molecules can be precisely adjusted.
A device for producing single crystals from a solid SiC supply, including a seed crystal having a crystallization surface, wherein the device comprises:
A device for producing single crystals from a solid SiC supply, including a plurality of seed crystals, each seed crystal having a crystallization surface, wherein the device comprises:
Dependencies are inferred from the claim text.