Process system with integrated gas storage and delivery unit
AssigneeAdvanced Technology Materials, Inc.
InventorsGlenn M. Tom, James V. McManus
Life of this patent
Estimating the term…
Abstract
A process system with an integrated gas storage and delivery unit comprising an adsorption-desorption apparatus, for storage and dispensing of a gas wherein the gas is dispensed by pressure differential desorption of the sorbate gas from the sorbent material. A motive fluid driver, e.g., a pump, blower, compressor, eductor, or the like, is arranged for flowing the dispensed gas to a gas-utilizing unit, such as an ion-implant unit, wastewater treatment unit, gas-liquid contacting chamber, chemical vapor deposition reactor, gas laser assembly, etc.
Claims25
A process for storage and dispensing of a gas sorbable on a solid-phase physical sorbent medium, said process comprising:
- providing a storage and dispensing vessel holding a solid-phase physical sorbent medium;
- adsorbing said gas on said solid-phase physical sorbent medium to yield said gas adsorbed on said solid-phase physical sorbent medium, at an interior pressure not exceeding about one atmosphere in said storage and dispensing vessel;
- establishing, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of at least a portion of said gas from the solid-phase physical sorbent medium as desorbed gas, and flowing said desorbed gas out of the storage and dispensing vessel;
- and
- pumping the desorbed gas from the storage and dispensing vessel to a predetermined pressure, wherein said predetermined pressure is higher than the pressure of the desorbed gas flowed out of the storage and dispensing vessel.
A process system, comprising:
- an adsorption-desorption apparatus, for storage and dispensing of a gas, said apparatus comprising:
- a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing gas into and out of said vessel;
- a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure not exceeding about one atmosphere;
- a sorbate gas physically adsorbed on said solid-phase physical sorbent medium;
- a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, comprising a motive fluid driver constructed and arranged to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbate gas from the solid-phase physical sorbent medium, and gas flow of desorbed gas through the dispensing assembly;
- and
- a gas utilization unit coupled in gas flow-receiving relationship to the dispensing assembly, for utilization of dispensed gas in said unit.
An adsorption-desorption apparatus, for storage and on-demand dispensing of a gas sorbable on a solid-phase physical sorbent medium, said apparatus comprising:
- a storage and dispensing vessel constructed and arranged for holding a solid-phase physical sorbent medium, and for selectively flowing gas into and out of said vessel;
- a solid-phase physical sorbent medium disposed in said storage and dispensing vessel at an interior gas pressure not exceeding about one atmosphere;
- a sorbate gas physically adsorbed on said solid-phase physical sorbent medium;
- a dispensing assembly coupled in gas flow communication with the storage and dispensing vessel, and constructed and arranged to provide, exteriorly of said storage and dispensing vessel, a pressure below said interior pressure, to effect desorption of sorbate gas from the solid-phase physical sorbent medium, and gas flow of desorbed gas through the dispensing assembly;
- and
- a selectively actuatable pump coupled to said dispensing assembly for extracting the sorbate gas from the solid-phase physical sorbent medium in the storage and dispensing vessel via desorption of the sorbate gas from the solid-phase physical sorbent medium, pressurizing the desorbed gas and discharging the resultingly pressurized gas.
Dependencies are inferred from the claim text.