Molecular vacuum pump with a gas-cooled rotor
AssigneeBalzers-Pfeiffer GmbH
InventorArmin Conrad
Life of this patent
Estimating the term…
Abstract
A method of cooling rotor elements of a molecular vacuum pump having stator and rotor elements, a suction flange defining a gas inlet, and a gas outlet spaced from the suction flange, the method including providing additional gas inlet between the suction flange and the gas outlet and admitting through the additional gas inlet a cooling gas having a thermal conductivity larger than that of the compressible gas.
Claims6
A method of cooling a molecular vacuum pump for compressing gases and having stator means, rotor means, a suction flange defining a gas inlet, and a gas outlet spaced from the suction flange, said method comprising the steps of:
- providing an additional gas inlet between the suction flange and the gas outlet;
- and
- admitting through the additional gas inlet a cooling gas for cooling the rotor means and having a thermal conductivity larger than a thermal conductivity of a compressible gas.
Dependencies are inferred from the claim text.