Method for the formation of a thin film actuated mirror array

A method for the manufacture of an array of M.times.N thin film actuated mirrors, wherein M and N are integers, for use in an optical projection system, the method comprising the steps of:

• providing an active matrix including a substrate with an array of M.times.N connecting terminals;
• depositing a thin film sacrificial layer on top of the active matrix;
• creating an array of M.times.N empty cavities on the thin film sacrificial layer, each of the empty cavities encompassing one of the connecting terminals;
• forming an array of M.times.N actuating structures on top of the thin film sacrificial layer including the empty cavities, each of the actuating structures including a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member and a conduit;
• forming a thin film protection layer completely covering each of the actuating structures;
• removing the thin film sacrificial layer by using an etchant;
• rinsing away the etchant by using a rinse;
• removing the rinse by using a spin drying method followed by a heat treatment;
• and
• removing the thin film protection layer, thereby forming the array of M.times.N thin film actuated mirrors.