Apparatus for detecting a mark pattern on a substrate

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• an optical member for controlling an intensity distribution of said illuminating light over a first plane in said illumination optical system, said first plane being practically in optical Fourier transform relation to said position detection mark, such that an intensity of the illuminating light in a substantially annular first area on said first plane which is centered at an optical axis of said illumination optical system is higher than that in another area on said first plane;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a substantially annular second area on a second plane in said image-forming optical system which second plane is practically in optical Fourier transform relation to said position detection mark, said second area being in image-forming relation to said first area, and an image-forming light beam distributed over an area on said second plane other than said second area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• a stop member wherein an illuminating light beam distributed over a substantially annular first area on a practical pupil plane of said illumination optical system can pass, said first area being centered at an optical axis of said illumination optical system;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a substantially annular second area on a practical pupil plane in said image-forming optical system, said second area being in image-forming relation to said first area, and an image-forming light beam distributed over an area on said practical pupil plane other than said second area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• a secondary light source forming member for forming a substantially annular secondary light source on a practical pupil plane of said illumination optical system, said secondary light source being centered at an optical axis of said illumination optical system;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a substantially annular area on a practical pupil plane of said image-forming optical system, said substantially annular area being in image-forming relation to said secondary light source, and an image-forming light beam distributed over an area on said practical pupil plane other than said substantially annular area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• an optical member for controlling a light intensity distribution over a practical pupil plane of said illumination optical system such that a light intensity in a substantially annular area which is centered at an optical axis of said illumination optical system is higher than that in an area on said practical pupil plane inside said substantially annular area;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a substantially circular area on a practical pupil plane of said image-forming optical system, said substantially circular area being in image-forming relation to said inside area, and an image-forming light beam distributed over an area on said practical pupil plane other than said substantially circular area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• an illuminating light beam limiting member for limiting an illuminating light beam at a first plane in said illumination optical system, said first plane being practically in optical Fourier transform relation to said position detection mark, so that said illuminating light beam passes through only a first area having a predetermined shape on said first plane;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a second area on a second plane in said image-forming optical system which second plane is practically in optical Fourier transform relation to said position detection mark, said second area having a shape corresponding to said predetermined shape and being in image-forming relation to said first area, and an image-forming light beam distributed over an area on said second plane other than said second area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• an optical member for controlling an intensity distribution of said illuminating light over a first plane in said illumination optical system, said first plane being practically in optical Fourier transform relation to said position detection mark, such that an intensity of said illuminating light in a first area having a predetermined shape on said first plane is higher than in another area on said first plane;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a second area on a second plane in said image-forming optical system which second plane is practically in optical Fourier transform relation to said position detection mark, said second area having a shape corresponding to said predetermined shape and being in image-forming relation to said first area, and an image-forming light beam distributed over an area on said second plane other than said second area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• a stop member wherein an illuminating light beam distributed over a first area on a practical pupil plane of said illumination optical system can pass, said first area having a predetermined shape;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over a second area on a practical pupil plane of said image-forming optical system, said second area having a shape corresponding to said predetermined shape and being in image-forming relation to said first area, and an image-forming light beam distributed over an area on said practical pupil plane other than said second area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• a secondary light source forming member for forming a secondary light source on a practical pupil plane of said illumination optical system, said secondary light source having a predetermined shape;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over an area on a practical pupil plane of said image-forming optical system, said area having a shape corresponding to said predetermined shape and being in image-forming relation to said secondary light source, and an image-forming light beam distributed over an area on said practical pupil plane other than said area.

A position detecting apparatus comprising:

• an illumination optical system for illuminating a position detection mark on a substrate by illuminating light in a predetermined wave band;
• an image-forming optical system for forming an image of said position detection mark on an imaging device by receiving light generated from said position detection mark;
• an image processing system for calculating a position of said position detection mark on the basis of an image signal output from said imaging device;
• an optical member for controlling a light intensity distribution over a practical pupil plane of said illumination optical system such that a light intensity in a first area having a predetermined shape is higher than that in a second area on said practical pupil plane which is different from said first area;
• and
• a phase-contrast member for giving a phase difference between an image-forming light beam distributed over an area on a practical pupil plane of said image-forming optical system, said area having a shape corresponding to said predetermined shape and being in image-forming relation to said first area, and an image-forming light beam distributed over an area on said practical pupil plane other than said area which is in image-forming relation to said first area.