Static induction transistors
AssigneeNorthrop Grumman Corporation
InventorsRichard R. Siergiej, Anant K. Agarwal, Rowland C. Clarke, Charles D. Brandt
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AssigneeNorthrop Grumman Corporation
InventorsRichard R. Siergiej, Anant K. Agarwal, Rowland C. Clarke, Charles D. Brandt
Estimating the term…
A static induction transistor includes a substrate and a drift layer with different doping levels. At least two mesas are formed on the drift layer and a heavily doped region is positioned on a top surface of each of the mesas. A gate contact extends along a bottom of a recess between the mesas and along a side of each of the mesas forming the recess. The gate contact also extends along a portion of the top surface of each of the mesas. In one embodiment of the invention, a notch is formed in the top surface of the mesas between the gate contact and the heavily doped region.
A static induction transistor comprising:
A static induction transistor as recited in claim 6, wherein the silicon carbide comprises one of 3C, 2H, 4H, 6H and 15R polytypes.
A recessed Schottky gate type static induction transistor comprising:
Dependencies are inferred from the claim text.