Cooling system for semiconductor process
AssigneeVanguard International Semiconductor Corporation
InventorKr-Zu Su
Life of this patent
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Abstract
A cooling system for use in a UV curing apparatus is disclosed. The cooling system includes a UV curing apparatus and a water supply element connected to the UV curing apparatus for cooling the curing apparatus via a first solenoid valve. A CPU is responsive to the UV curing apparatus for controlling the status of the first solenoid valve. An inverter is connected to the CPU and its output is coupled to a second solenoid valve. The second solenoid valve connects an air purging element to the curing apparatus. The air purging element provides clean dry air to force the water out of the curing apparatus.
Claims6
A cooling system for a curing apparatus used in a semiconductor process, said curing apparatus including a magnetron and a reflector for generating radiation, said cooling system comprising:
- a water supply element connected to said curing apparatus for supplying cooling water to said curing apparatus;
- a first solenoid valve located between said water supply element and said curing apparatus, said first solenoid valve allowing said cooling water to flow when set to an on position;
- an air purging element connected to said curing apparatus for providing a gas to force said cooling water out of said curing apparatus;
- a second solenoid valve located between said air purging element and said curing apparatus, said second solenoid valve allowing said gas to flow when set to an on position;
- and
- a CPU for controlling the first and second solenoid valves, said CPU setting said first solenoid valve in said on position and said second solenoid valve in an off position when said curing apparatus is operating and setting said first solenoid valve in an off position and said second solenoid valve in said on position when said curing apparatus is not operating.
Dependencies are inferred from the claim text.