Scanning fluorescent microthermal imaging apparatus and method
AssigneeSandia Corporation
InventorsDaniel L. Barton, Paiboon Tangyunyong
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Abstract
A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.
Claims29
An apparatus for performing fluorescent microthermal imaging procedures on a substrate positioned in thermal contact with a fluorescent material, comprising:
- (a) means for providing excitation to the fluorescent material, thereby causing the material to fluoresce in response to temperature variations in the substrate;
- (b) means for collecting data from the fluorescence a single pixel at a time;
- and
- (c) means for translating a plurality of single pixels of data into a thermal image of the temperature variations in the substrate.
An apparatus for performing fluorescent microthermal imaging procedures on a microelectronic device positioned in thermal contact with a fluorescent EuTTA thin film, comprising:
- (a) a laser scanning source for providing a scanned and focused beam of excitation energy to the EuTTA thin film, thereby causing the EuTTA thin film to fluoresce responsive to any temperature variations of the device.
- (b) a scanning laser microscope optically coupled with a single-point detector for collecting fluorescence emission dam one pixel at a time;
- and
- (c) a computer imaging means for translating the fluorescence emission data from each pixel into a composite thermal image of the microelectronic device showing any temperature variations therein.
A method of performing fluorescent microthermal imaging procedures on a substrate positioned in thermal contact with a fluorescent material comprised of at least one member from the group consisting of rare earth chelates, the method comprising the steps of:
- (a) exciting the fluorescent material with a scanned and focused beam of excitation energy, thereby causing the material to fluoresce responsive to any temperature variations of the substrate;
- (b) collecting the fluorescence in the form of single pixels of data collected one pixel at a time;
- and
- (c) translating the single pixel data into a thermal image of the substrate for providing an indication of any temperature variations in the substrate.
Dependencies are inferred from the claim text.