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US 5,705,745 AGranted
Mass flow sensor
AssigneeRobert Bosch GmbH
InventorsChristoph Treutler, Detlef Gruen, Horst Muenzel, Helmut Baumann, Steffen Schmidt, Andreas Lock
Life of this patent
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Abstract
In a mass flow sensor having a frame of monocrystalline silicon and a membrane fixed therein, a heating element and, if indicated, temperature-measuring elements are provided on the membrane. A heat-conducting element, which extends from the membrane across the frame, is provided in the edge area of the membrane. The heating element, the heat-conducting element and, if indicated, temperature-measuring elements are patterned out of a single metal layer.
Claims10
A mass flow sensor comprising:
- a frame composed at least partially of monocrystalline silicon;
- a membrane fixed in the frame, the membrane having an edge;
- a metal layer;
- a heating element patterned out of the metal layer, the heating element being arranged on the membrane;
- at least one temperature-measuring element patterned out of the metal layer;
- and
- at least one heat-conducting element patterned out of the metal layer, the heat-conducting element being arranged at the edge of the membrane, the heat-conducting element extending from the membrane across the frame, the heat-conducting element conducting heat from the heating element.
4 more elements
Dependencies are inferred from the claim text.