Apparatus and a process for regenerating a CUCl.sub.2 etchant
AssigneeOxley Research, Inc.
InventorsJames E. Oxley, Raymond J. Smialek, Ronald A. Putt
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AssigneeOxley Research, Inc.
InventorsJames E. Oxley, Raymond J. Smialek, Ronald A. Putt
Estimating the term…
The present invention relates to an apparatus and a process for regenerating a used etchant solution, which solution contains a metal in divalent form. The apparatus includes a tank which is originally supplied with the etchant solution; a first electrolytic cell for converting solution from the tank to a solution containing a high fraction of a monovalent form of the metal; and a second electrolytic tank for plating metal from the solution containing a high fraction of the monovalent form of the metal. The details of the process of the present invention are set forth in the disclosure.
An apparatus for regenerating a used etchant solution in a sump, said used etchant solution containing a metal in divalent form, said apparatus comprising:
A process for regenerating a solution of used etchant in a sump, said used etchant solution containing a concentration of a metal in divalent form, said process comprising the steps of:
Dependencies are inferred from the claim text.