Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means

A moving magnet type multi-phase linear motor for moving a movable element relative to a stationary element by giving a thrust to a magnet of the movable element side by supplying a current to a plurality of coils of the stationary element side, comprising:

• support members for supporting the plurality of coils by holding two end portions of the coils, said support members extending along a coil arrangement direction;
• pipes for supplying a coolant inside said support members, said pipes extending along the coil arrangement direction;
• and
• a fixing member for fixing the stationary element, said fixing member being arranged at substantially central portions of the coils to extend along the coil arrangement direction, wherein the movable element has a substantially C-shaped section when viewed along a direction perpendicular to the coil arrangement direction, wherein recess portions or grooves are formed in said fixing member, and the plurality of coils are arranged in the recess portions or grooves.

A moving magnet type multi-phase linear motor for moving a movable element relative to a stationary element by giving a thrust to a magnet of the movable element side by supplying a current to a plurality of coils of the stationary element side, comprising:

• support members for supporting the plurality of coils by holding two end portions of the coils, said support members extending along a coil arrangement direction;
• pipes for supplying a coolant to inside said support members, said pipes extending along the coil arrangement direction;
• a fixing member for fixing the stationary element, said fixing member being arranged on said support members to extend along the coil arrangement direction, wherein the movable element has a substantially U-shaped section when viewed along a direction perpendicular to the coil arrangement direction;
• and
• a cooling pipe for supplying a coolant to said fixing member arranged in said fixing member.

A moving magnet type multi-phase linear motor for moving a movable element relative to a stationary element by giving a thrust to a magnet of the movable element side by supplying a current to a plurality of coils of the stationary element side, comprising:

• support members for supporting the plurality of coils by holding two end portions of the coils, said support members extending along a coil arrangement direction;
• pipes for supplying a coolant to inside said support members, said pipes extending along the coil arrangement direction;
• first and second fixing members for fixing the stationary element, said first fixing member being arranged at substantially central portions of the coils to extend along the coil arrangement direction, and said second fixing members being arranged at two end portions, in the coil arrangement direction, of the stationary element, wherein the movable element has a substantially C-shaped section when viewed along a direction perpendicular to the coil arrangement direction;
• and
• a cooling pipe for supplying a coolant to said first fixing member.

A moving magnet type multi-phase linear motor for moving a movable element relative to a stationary element by giving a thrust to a magnet of the movable element side by supplying a current to a plurality of coils of the stationary element side, comprising:

• support members for supporting the plurality of coils by holding two end portions of the coils, said support members extending along a coil arrangement direction;
• pipes for supplying a coolant to inside said support members, said pipes extending along the coil arrangement direction;
• and
• first and second fixing members for fixing the stationary element, said first fixing member being arranged at substantially central portions of the coils to extend along the coil arrangement direction, and said second fixing members being arranged at two end portions, in the coil arrangement direction, of said stationary element, wherein the movable element has a substantially C-shaped section when viewed along a direction perpendicular to the coil arrangement direction, wherein recess portions or grooves are formed in said first fixing member, and the plurality of coils are arranged in the recess portions or grooves.

A moving magnet type multi-phase linear motor for moving a movable element relative to a stationary element by giving a thrust to a magnet of the movable element side by supplying a current to a plurality of coils of the stationary element side, comprising:

• support members for supporting the plurality of coils by holding two end portions of the coils, said support members extending along a coil arrangement direction;
• pipes for supplying a coolant to inside said support members, said pipes extending along the coil arrangement direction;
• and
• first and second fixing members for fixing the stationary element, said first fixing member being arranged at substantially central portions of the coils to extend along the coil arrangement direction, and said second fixing members being arranged at two end portions, in the coil arrangement direction, of said stationary element, wherein the movable element has a substantially C-shaped section when viewed along a direction perpendicular to the coil arrangement direction.