Endcap for indirectly heated cathode of ion source
AssigneeEaton Corporation
InventorsThomas N. Horsky, William E. Reynolds, Richard M. Cloutier
Life of this patent
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AssigneeEaton Corporation
InventorsThomas N. Horsky, William E. Reynolds, Richard M. Cloutier
Estimating the term…
An ion source for use in an ion implanter. The ion source comprises a gas confinement chamber having conductive chamber walls that bound a gas ionization zone. The gas confinement chamber includes an exit opening to allow ions to exit the chamber. A base positions the gas confinement chamber relative to structure for forming an ion beam from ions exiting the gas confinement chamber. A portion of a cathode extends into an opening in the gas confinement chamber. The cathode includes a cathode body defining an interior region in which a filament is disposed. The cathode body comprises an inner tubular member a coaxial outer tubular member and an endcap having a reduced cross section body portion with a radially extending rim. The endcap is pressed into the inner tubular member. The filament is energized to heat the endcap which, in turn, emits electrons into the gas ionization zone. The filament is protected from energized plasma in the gas ionization zone by the cathode body.
An ion source for use in an ion implanter, said ion source comprising:
A cathode for emitting ionizing electrons into an ionization region of a confinement chamber to ionize gas molecules, the cathode comprising:
A cathode body endcap supported in a distal end of a tube for emitting ionizing electrons into an ionization region of a confinement chamber to produce ions within the ionization region, the endcap comprising a first end and a second end spaced apart from said first end by a body portion and having a radially projecting support extending outwardly from the body portion, the second end of the endcap positioned with respect to the ionization region of the confinement chamber to emit said ionizing electrons into the ionization region and the first end of the endcap adjacent a heat source, the endcap emitting said ionizing electrons into the ionization region of the confinement chamber when heated by the heat source, the radially projecting support contacting an inner surface of the tube to support the endcap within the distal end of the tube, the radially projecting support having a thickness in an axial direction less than a thickness in an axial direction of the endcap body portion.
Dependencies are inferred from the claim text.