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US 5,703,287 AGranted
Measuring element for a flow sensor
AssigneeRobert Bosch GmbH
InventorsChristoph Treutler, Rolf Benz, Horst Muenzel, Steffen Schmidt, Eckart Reihlen, Andreas Lock
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Abstract
In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.
Claims7
A measuring element for a flow sensor, the measuring element attaching to a bonding wire, comprising:
- a membrane;
- a platinum layer;
- at least one heater arranged on the membrane;
- at least one temperature sensor arranged on the membrane, the temperature sensor being patterned out of the platinum layer;
- at least one printed circuit trace for contacting the heater and the temperature sensor, the printed circuit trace being patterned out of the platinum layer;
- and
- an interconnection region for attaching to the bonding wire, the interconnection region including a metal layer composed of a metal other than platinum.
4 more elements
Dependencies are inferred from the claim text.