Mixed polymers
AssigneeSiemens Aktiengesellschaft
InventorsRecai Sezi, Horst Borndoerfer, Hellmut Ahne, Siegfried Birkle, Eberhard Kuehn, Rainer Leuschner, Eva Rissel, Michael Sebald
Life of this patent
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Abstract
Premixed polymers which can serve as base polymers for high-resolution resists are structured from 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid.
Claims9
A non-grafted terpolymer characterized by 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid as a first component, 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid as a second component and an unsaturated aromatic compound as a third component.
A non-grafted terpolymer characterized by 40 to 99 mole % of methacrylic acid tert. butyl ester or vinyl benzoic acid tert. butyl ester as a first component, 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid as a second component and an unsaturated aromatic compound as a third component.
Dependencies are inferred from the claim text.