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US 5,702,773 AGranted
Method for preparing a fluoro-containing polyimide film
AssigneeNEC Corporation
InventorKazuhiko Endo
Life of this patent
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Abstract
A method for blending fluorine into a polyimide free of fluorine comprises the steps of generating fluorine radicals in a fluorine based gas, removal of any charge particles from the gas to leave the fluorine radicals in the gas, and exposing a polyimide free of fluorine to an irradiation of the fluorine radicals so that the irradiated fluorine radicals penetrate into an inside of the polyimide without showing any reaction to the removed charge particles on a surface of the polyimide.
Claims8
A method for blending fluorine into a polyimide free of fluorine comprising the steps of:
- generating fluorine radicals in a fluorine based gas;
- removal of any charge particles from said gas to leave said fluorine radicals in said gas;
- and
- exposing a polyimide free of fluorine to an irradiation of said fluorine radicals so that said irradiated fluorine radicals penetrate into said polyimide without any reaction between said irradiated fluorine radicals and said removed charge particles on a surface of said polyimide.
1 more element
Dependencies are inferred from the claim text.