Method of operating a growing hall containing puller cells
AssigneeSEH America, Inc.
InventorsKazuo Sakauchi, Yoshihiro Hirano, Akira Uchikawa
Life of this patent
Estimating the term…
Loading patent…
AssigneeSEH America, Inc.
InventorsKazuo Sakauchi, Yoshihiro Hirano, Akira Uchikawa
Estimating the term…
A crystal puller cell (18) provides a low particulate environment for an individual crystal puller (28). The airflow within each cell is adjustable so that a particulate level appropriate to the activity within the cell is maintained, thereby avoiding the cost of maintaining an entire growing hall (10) at a constant high level of cleanliness. Each cell includes a multi-level floor (46) that includes an operator floor (48) and a maintenance floor (52). A door (62) at the maintenance floor level opens onto a maintenance aisle used to service the machines. A door (64), at the operator floor level, opens onto a clean aisle for transporting raw material and finished product. The cell walls can include magnetic shielding if a magnetic growing process is used to reduce exposure of operators and other machines to intense magnetic fields.
A method of operating a growing hall to reduce clean room costs and improve cleanliness, comprising:
Dependencies are inferred from the claim text.