Device for the insolation of micrometric and/or submicrometric areas in a photosensitive layer and a method for the creation of patterns in such a layer

A method of producing micrometric or submicrometric patterns in a layer of photosensitive material positioned on a substrate comprising the steps of:

• subjecting the layer to an atmosphere containing liquid that does not wet the photosensitive material in a manner that produces a monolayer of micro-droplets of the non-wetting liquid on this layer, the photosensitive material layer being kept at a temperature sufficiently low to prevent the coalescence of the micro-droplets with one another,
• insolating the layer of photosensitive material through the monolayer of micro-droplets to selectively print areas of exposure of the photosensitive layer with an insolation light,
• removing the micro-droplets,
• developing the layer of photosensitive material to form micrometric or submicrometric patterns in accordance with the areas of exposure,
• wherein the non-wetting liquid is transparent to the insolation light, each micro-droplet focusing the light in said areas of exposure.