Positive acid catalyzed resists having an alkali soluble resin with acid labile groups and inert blocking groups
AssigneeShipley Company, L.L.C.
InventorsJames W. Thackeray, Roger F. Sinta, Mark D. Denison, Sheri L. Ablaza
Life of this patent
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Abstract
The invention comprises an acid hardened resist system consisting of a resin binder having acid labile blocking groups and inert blocking groups and a photoacid generator. The inclusion of inert blocking groups on the resin improves shelf life without deleteriously affecting photolithographic properties of the resist.
Claims13
A positive acting photoresist composition comprising the combination of an alkali soluble novolak resin binder having pendant phenolic hydroxyl groups, pendant inert blocking groups and pendant acid labile groups and a photoacid generator that generates an acid upon exposure to activating radiation, said resin binder having been formed by reacting a minor portion of its pendant hydroxyl groups to form sulfonic acid ester groups inert to photogenerated acid and an additional minor portion of its pendant hydroxyl groups to form acid labile groups that cleave upon exposure to photogenerated acid, said photoacid generator being present in an amount whereby sufficient acid is generated exposure to activating radiation of sufficient strength to cleave the pendant acid labile groups causing said resin binder to become soluble in aqueous alkali solution.
A positive acting photoresist composition comprising the combination of an alkali soluble novolak resin binder having phenolic groups and cyclic alcohol groups, each having pendant phenolic hydroxyl groups, pendant inert blocking groups and pendant acid labile groups;
- and a photoacid generator that generates an acid upon exposure to activating radiation, said resin binder having been formed by reacting a minor portion of its pendant hydroxyl groups to form acid ester groups inert to photogenerated acid and an additional minor portion of its pendant hydroxyl groups to form acid labile groups that cleave upon exposure to photogenerated acid, said photoacid generator being present in an amount whereby sufficient acid is generated upon exposure to activating radiation of sufficient strength to cleave said pendant acid labile groups causing said resin binder becomes soluble in aqueous alkali solution.
Dependencies are inferred from the claim text.