Method and apparatus for precision determination of phase-shift in a phase-shifted reticle

A phase-shifted reticle comprising a metrology pattern, said metrology pattern comprising:

• a first feature, said first feature being a phase-shifted feature;
• and,
• a second feature, said second feature being a non phase-shifted feature.

A phase-shifted reticle comprising a metrology feature, said metrology feature comprising:

• a first feature, said first feature, being a phase-shifted feature;
• and,
• a second feature, said second feature being a phase-shifted feature wherein said phase-shift of said first feature is in an opposite direction of said phase-shift of said second feature.

A phase-shifted reticle comprising:

• a plurality of first features, wherein said plurality of first features are phase-shifted features having a first feature phase-shift, and wherein the magnitude of said first feature phase-shift of one of said plurality of first features is different from the magnitude of said first feature phase-shift for another of said plurality of first features;
• and,
• a second feature, said second feature being a non phase-shifted feature.

A phase-shifted reticle comprising:

• a plurality of first features, wherein said plurality of first features are phase-shifted features having a first feature phase-shift, and wherein the magnitude of said first feature phase-shift of one of said plurality of first features is different from the magnitude of said first feature phase-shift for another of said plurality of first features;
• and,
• a plurality of second features, wherein said plurality of second features are phase-shifted features having a second feature phase-shift, and wherein said first feature phase-shift is in an opposite direction of said second feature phase-shift and wherein the magnitude of said second feature phase-shift for one of said plurality of second features is approximately equal to that of said one of said plurality of said first features and wherein the magnitude of said second feature phase-shift for another of said plurality of said second features is approximately equal to that of said another of said plurality of said first features.