Method for manufacturing thin zirconia film

A method for manufacturing a thin zirconia film comprising the steps:

• preparing a suspension in which partially-stabilized or stabilized zirconia particles having electric charges are dispersed in an organic solvent consisting of ketone or alcohol;
• adjusting an electric conductivity of the suspension by adding iodine to the suspension;
• positioning a pair of electrodes in the suspension first of said electrodes being made of a perovskite oxide represented by the formula (Ln.sub.1-x A.sub.x).sub.y DO.sub.3 where Ln is at least one lanthanide, A is at least one selected from a group consisting of Ca, Sr and Ba, D is at least one selected from a group consisting of Mn, Cr and Co, and X and Y respectively satisfy 0.ltoreq.X.ltoreq.1 and 0.8.ltoreq.Y.ltoreq.1;
• applying an electric field between the electrodes, said zirconia particles moving to a first electrode of said pair of electrodes and said zirconia particles being electrophoretically deposited on the first electrode electrochemically, to form a zirconia film;
• and
• sintering the zirconia film to form a partially-stabilized or stabilized thin zirconia film.