Susceptor for a device for epitaxially growing objects and such a device
AssigneeABB Research Ltd.
InventorsOlle Kordina, Jan-Olov Fornell, Rune Berge, Roger Nilsson
Life of this patent
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AssigneeABB Research Ltd.
InventorsOlle Kordina, Jan-Olov Fornell, Rune Berge, Roger Nilsson
Estimating the term…
A susceptor for a device for epitaxially growing objects made of one of SiC, a Group 3B-nitride and alloys thereof on a substrate to be received in the susceptor, includes plurality of separate susceptor wall pieces defining a top wall, a bottom wall and lateral walls. The wall pieces are made of a material which may be heated by induction and are secured to each other to form the susceptor. A channel is defined by susceptor walls adapted to receive the substrate and through which a source material for the growth is to be fed. At least one SiC-plate is inserted to cover at least one of the top and bottom walls and to extend between and separate the lateral walls and the at least one of the top and bottom walls.
A susceptor for a device for epitaxially growing objects made of one of SiC, a Group 3B-nitride and alloys thereof on a substrate to be received in the susceptor, said susceptor including:
A device for epitaxially growing objects made of one of SiC, a Group 3B-nitride and alloys thereof on a substrate, said device comprising:
Dependencies are inferred from the claim text.