Etch rate monitoring by optical emission spectroscopy
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShu Chi Hung, Hun-Jan Tao
Life of this patent
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Abstract
The etch rate in a plasma etching system has been monitored in-situ by using optical emission spectroscopy to measure the intensities of two or more peaks in the radiation spectrum and then using the ratio of two such peaks as a direct measure of etch rate. Examples of such peaks occur at 338.5 and 443.7 nm and at 440.6 and 437.6 nm for the fluoride/SOG system. Alternately, the intensities of at least four such peaks may be measured and the product of two ratios may be used. Examples of peaks used in this manner occurred at 440.5, 497.2 and 502.3 nm, also for the fluoride/SOG system. The method is believed to be general and not limited to fluoride/SOG.
Claims17
A method for in-situ monitoring the etch rate of a layer, comprising:
- providing a silicon substrate bearing said layer;
- providing a gaseous plasma that emits radiation and that etches said layer;
- providing power to form the plasma and inserting the substrate therein, thereby causing etching to take place;
- measuring intensity values for said radiation at wavelengths 388.5 and 443.7 nanometers of the radiation;
- and
- computing the quotient of the intensity at 388.5 nanometers divided by the intensity at 443.7 nanometers, thereby providing a number that is proportional to said etch rate.
A method for in-situ monitoring the etch rate of a layer, comprising:
- providing a substrate bearing said layer;
- providing a gaseous plasma that emits radiation and that etches said layer;
- providing power to form the plasma and inserting the substrate therein, thereby causing etching to take place;
- measuring first and second intensity values for said radiation, at first and second wavelengths of the radiation respectively;
- measuring third and fourth intensity values for said radiation, at third and fourth wavelengths of the radiation respectively;
- computing a first quotient comprising the first intensity value divided by the second intensity value;
- computing a second quotient comprising the third intensity value divided by the fourth intensity value;
- and
- computing the product of the first quotient multiplied by the second quotient, thereby providing a number that is proportional to said etch rate.
A method for in-situ monitoring the etch rate of a layer, comprising:
- providing a silicon substrate bearing said layer;
- providing a gaseous plasma that emits radiation and that etches said layer;
- providing power to form the plasma and inserting the subtrate therein, thereby causing etching to take place;
- measuring intensity values for said radiation at wavelengths 440.6 and 437.6 nanometers of the radiation;
- and
- computing the quotient of the intensity at 440.6 nanometers divided by the intensity at 437.6 nanometers, thereby providing a number that is proportional to said etch rate.
Dependencies are inferred from the claim text.