Wafer orientation alignment system
AssigneeVarian Associates, Inc.
InventorRichard F. Landau
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Abstract
An apparatus and method for precisely calibrating the transfer arm of a multiple station wafer processing system without breaking vacuum and with a minimum of system downtime is provided. A system of determining and properly aligning the crystallographic orientation of the wafers before processing as well as monitoring the orientation of individual wafers during wafer transfer between processing stations is also provided.
Claims8
A method of aligning a crystallographic orientation of a wafer in a sealable semiconductor processing system, said method comprising the steps of:
- defining a desired wafer orientation;
- remotely imaging said wafer with a video camera, said wafer coupled to a rotation stage;
- determining said crystallographic orientation of said wafer while said system is sealed;
- and
- rotating said stage until said crystallographic orientation of said wafer is aligned with said desired wafer orientation.
An orientation alignment system for aligning a crystallographic orientation of a wafer, said wafer within a sealable semiconductor processing system, said alignment system comprising:
- a wafer rotation stage within said sealable semiconductor processing system, said wafer coupled to said rotation stage;
- a video camera mounted in a location adjacent to said rotation stage, said location of said camera allowing said camera to observe said crystallographic orientation of said wafer while said sealable semiconductor processing system is sealed;
- and
- a controller for remotely rotating said wafer rotation stage while said sealable semiconductor processing system is sealed.
Dependencies are inferred from the claim text.