Process for growing crystals
AssigneeDeutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
InventorUwe Becker
Life of this patent
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Abstract
In order to improve a process for growing crystals from a molten zone which is heated and to which a source material is supplied which is melted and deposited in crystalline form on a substrate from the molten zone, such that dimensions of the substrate along an interface between the substrate and the molten zone are dependent to a lesser extent on dimensions of the source material supplied to the molten zone, it is suggested that the molten zone be mechanically stabilized by a wall member which forms a boundary of the molten zone and is essentially immovable relative to the molten zone, a base member which forms a lower boundary of the molten zone and is movable relative to the wall member and a meniscus arranged between the base member and the wall member.
Claims59
A process for growing a crystal from a molten zone, said molten zone being heated and having a source material supplied to it, said source material being melted and deposited in crystalline form on a substrate from the molten zone, characterized in that the molten zone is mechanically stabilized by an annular wall member forming a boundary of the molten zone and being essentially immovable relative to the molten zone, a base member forming a lower boundary of the molten zone and being movable relative to the wall member and a meniscus arranged between the base member and the wall member.
A process for growing a crystal from a molten zone, said molten zone being heated by means of laser radiation and having a source material supplied to it, said source material being melted and deposited in crystalline form on a substrate from the molten zone, wherein the molten zone is mechanically stabilized by a wall member forming a boundary of the molten zone and being essentially immovable relative to the molten zone, a base member forming a lower boundary of the molten zone and being movable relative to the wall member and a meniscus arranged between the base member and the wall member, characterized in that the wall member encloses the molten zone in such a manner that an interface between the wall member and the molten zone separates an additional meniscus arranged on a side of the molten zone facing away from the base member from the meniscus arranged between the base member and the wall member and that a laser beam focused onto the molten zone with an annular cross section is generated by an optical projection means.
Dependencies are inferred from the claim text.