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US 5,688,631 AGranted
Methods for producing polybenzoxazol precursors and corresponding resist solutions
AssigneeSiemens Aktiengesellschaft
InventorsRecai Sezi, Hellmut Ahne, Eva Rissel
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Abstract
Methods for producing solutions of polybenzoxazol precursors that are soluble in alkali and resist solutions based on such precursors. A dicarboxylic acid halogenide is reacted with a bis-(o-aminophenol) in an organic solvent and in the presence of a polymer with a tertiary N atom, which is insoluble in the solvent. Excess polymer and hydrohalogenide are separated from the reaction solution. The reaction solution is optionally mixed with a photoactive component.
Claims9
A method for producing a solution of polybenzoxazol precursors soluble in alkali, comprising:
- reacting a dicarboxylic acid halogenide with a bis-(o-aminophenol) in an organic solvent, in the presence of a polymer with a tertiary N atom which is insoluble in the solvent, the polymer being a vinyl pyridine, acryl, methacryl, allyl or vinyl homopolymer, copolymer or terpolymer;
- and
- separating excess polymer and hydrohalogenide from the reaction solution.
Dependencies are inferred from the claim text.