Method of and apparatus for removing coating from edge of substrate

An apparatus for removing a coating from an edge of a substrate, comprising:

• a base;
• a substrate holder mounted on said base, for holding a substrate;
• a removing unit for removing a coating from an edge of the substrate, said removing unit being mounted on said base for movement relative to said substrate holder;
• said removing unit having a slot for horizontally receiving a portion of the edge of the substrate, and a solvent supply port opening into said slot for supplying a solvent into said slot such that the portion of the substrate edge is entirely immersed in the solvent when the edge portion is received in the slot, to thereby dissolve and remove a coating from the edge of the substrate;
• the slot containing the solvent supplied therein;
• and
• means for drawing the solution in and along said slot.

An apparatus for removing a coating from an edge of a substrate, comprising:

• a substrate holder for holding a substrate;
• a removing unit for removing a coating from an edge of the substrate which is held by said substrate holder;
• said removing unit having a slot for horizontally receiving a portion of the edge of the substrate, and a solvent supply port opening into said slot for supplying a solvent into said slot such that the edge portion is entirely immersed in the solvent in the slot when the edge portion is received in the slot, to thereby dissolve and remove a coating from the edge of the substrate;
• said slot containing the solvent supplied therein;
• and
• means for guiding said removing unit to move along the edge of the substrate while the solvent supplied from said solvent supply port is being applied to the edge of the substrate in said slot.

An apparatus for removing a coating from an edge of a substrate, comprising:

• means for supporting a substrate in a horizontal orientation;
• means for removing a coating from an edge of the substrate, said removing means including a member with a slot defined therein for receiving a portion of the edge of the substrate, and means for passing a solvent along the slot;
• the portion of the substrate edge being entirely immersed in the solvent when the portion is received in the slot;
• the slot containing the solvent passed therealong;
• and
• means for moving at least one of said substrate holding means and said removing means relative to the other.