Method of fabricating an electrically alterable resistive component using germanium
AssigneeUnisys Corporation
InventorBruce Boyd Roesner
Life of this patent
Estimating the term…
Abstract
A memory cell includes a pair of spaced apart conductors on an insulating layer, and a novel electrically alterable resistive component between the conductors. This resistive component consist essentially of Germanium, having a crystalline grain size which is smaller than polycrystalline; and the Germanium switches from a high resistance to a low resistance upon the application of a threshold voltage across the conductors.
Claims5
A process for fabricating an electrically alterable resistive component in an integrated circuit which includes a semiconductor substrate having a major surface and an insulating layer over said surface;
- said process including the steps of:
- forming a bottom electrical lead on said insulating layer;
- depositing and patterning a layer of electrically alterable material, which changes resistance irreversibly, such that the patterned electrically alterable material overlies and is coupled to said bottom lead;
- forming a top electrical lead which extends over and is there coupled to said electrically alterable material;
- limiting said electrically alterable material to consist of germanium, with or without dopant atoms;
- and,
- confining said electrically alterable material, from its deposition through a predetermined final step that completes said integrated circuit, to temperatures which cause said electrically alterable material to have a smaller crystalline grain size than that of polycrystalline germanium.
Dependencies are inferred from the claim text.