Method of manufacturing a single crystal thin film
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsTakatoshi Nagoya, Hisashi Kashino, Hitoshi Habuka
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Abstract
In the preparation stage before the manufacturing of the single crystal thin film 13, growth conditions are determined by conducting a vapor phase growth without rotating the rotatable holder 14 on its axis and making adjustments such that the growth rate of the single crystal thin film 13 is laterally asymmetric with respect to the virtual center axis on the holder 14 parallel to the feeding direction of the source material gas 19, and then said single crystal thin film is manufactured based on said growth conditions.
Claims3
A method of manufacturing a single crystal thin film which comprises vapor phase growth of a single crystal thin film on a semiconductor single crystal substrate placed on a holder for rotating on its own axis in a reactor vessel by feeding the source material gas to said semiconductor single crystal substrate:
- wherein growth conditions are determined by conducting a vapor phase growth of a single crystal thin film on said semiconductor single crystal substrate without rotating said holder on its axis in the preparation stage before the manufacturing of said single crystal thin film;
- and then
- said single crystal thin film is manufactured based on said growth conditions.
Dependencies are inferred from the claim text.