US 5,684,315 A · Semiconductor memory device including memory cells each having an information storage capacitor component formed over control electrode of cell selecting transistor · patentgrep

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Abstract

A semiconductor memory device has memory cells provided at intersections between word line conductors and data line conductors. Each of the memory cells includes a cell selecting transistor and an information storage capacitor. The capacitor in each of the memory cells includes a first capacitor component formed over the control electrode of the transistor and a second capacitor component formed over a word line conductor which is adjacent to a word line conductor integral with the control electrode of the transistor. Each of the first and second capacitor components has a common electrode, a storage electrode and a dielectric film sandwiched therebetween, and the storage electrode is at a level higher than the common electrode in each of said first and second capacitor components. The storage electrodes of the first and second capacitor components are electrically connected with each other and with one of the semiconductor regions of the transistor. The other semiconductor region of the transistor is electrically connected with one of the data line conductors. Patterning of the storage electrodes of the first and second capacitor components is preferalbly effected by use of masks of a stripe pattern.

Claims13

Dependent claims

A semiconductor memory device comprising:

a semiconductor substrate;
a plurality of word line conductors formed over said substrate and a plurality of data line conductors formed over said substrate generally perpendicularly to said word line conductors;
and
a plurality of memory cells each provided at an intersection between one of said word line conductors and one of said data line conductors and including a cell selecting transistor and an information storage capacitor, said transistor having a pair of semiconductor regions formed in a surface portion of said substrate and a control electrode formed over said surface portion of said substrate between said pair of semiconductor regions and integral with one of said word line conductors, wherein in each of said memory cells
said capacitor includes a first capacitor component formed over said control electrode of the transistor and a second capacitor component formed over that one of said word line conductors which is adjacent to one of said word line conductors integral with said control electrode of the transistor,
each of said first and second capacitor components having a common electrode, a storage electrode and a dielectric film sandwiched therebetween, wherein at least the storage electrodes of the capacitor components are physically separated from one another by a predetermined distance so as not to physically contact each other, the storage electrode being at a level higher than the common electrode in each of said first and second capacitor components, the storage electrodes of said first and second capacitor components being electrically connected with each other and with one of said semiconductor regions of the transistor, and
the other semiconductor region of the transistor is electrically connected with one of said data line conductors.

4 more elements

A semiconductor memory device comprising:

a semiconductor substrate;
a plurality of word line conductors formed over said substrate and a plurality of data line conductors formed over said substrate generally perpendicularly to said word line conductors;
and
a plurality of memory cells each provided at an intersection between one of said word line conductors and one of said data line conductors and including a cell selecting transistor and an information storage capacitor, said transistor having a pair of semiconductor regions formed in a surface portion of said substrate and a control electrode formed over said surface portion of said substrate between said pair of semiconductor regions and integral with one of said word line conductors, wherein in each of said memory cells
said capacitor includes a first capacitor component formed over said control electrode of the transistor and a second capacitor component formed over that one of said word line conductors which is adjacent to the one of said word line conductors integral with said control electrode of the transistor,
each of said first and second capacitor components having a common electrode, a storage electrode and a dielectric film sandwiched therebetween, the storage electrode being at a level higher than the common electrode in each of said first and second capacitor components, the storage electrodes of said first and second capacitor components being electrically connected with each other and with one of said semiconductor regions of the transistor, and
the other semiconductor region of the transistor is electrically connected with one of said data line conductors, wherein in each of said memory cells,
a first side wall spacer is provided to cover a side surface of said common electrode of said first capacitor component and a side surface of the control electrode of the transistor and a second side wall spacer is provided to cover a side surface of said common electrode of said second capacitor component and a side surface of said adjacent one word line conductor, said side surfaces covered by said first side wall spacer being opposed to said side surfaces covered by said second side wall spacer, and
a connection electrode is provided for electrical connection of said storage electrodes of the first and second capacitor components with each other and with said one semiconductor region of the transistor in each of said memory cells, said connection electrode extending to overlie said one semiconductor region of the transistor, said first and second side wall spacers and said storage electrodes of said first and second capacitor components.

6 more elements

A semiconductor memory device comprising:

a semiconductor substrate;
a plurality of word line conductors formed over said substrate and a plurality of data line conductors formed over said substrate generally perpendicularly to said word line conductors;
and
a plurality of memory cells each provided at an intersection between one of said word line conductors and one of said data line conductors and including a cell selecting transistor and an information storage capacitor, said transistor having a pair of semiconductor regions formed in a surface portion of said substrate and a control electrode formed over said surface portion of said substrate between said pair of semiconductor regions and integral with one of said word line conductors, wherein in each of said memory cells
said capacitor includes a first capacitor component formed over said control electrode of the transistor and a second capacitor component formed over that one of said word line conductors which is adjacent to the one of said word line conductors integral with said control electrode of the transistor,
each of said first and second capacitor components having a common electrode, a storage electrode and a dielectric film sandwiched therebetween, the storage electrode being at a level higher than the common electrode in each of said first and second capacitor components, the storage electrodes of said first and second capacitor components being electrically connected with each other and with one of said semiconductor regions of the transistor, and
the other semiconductor region of the transistor is electrically connected with one of said data line conductors, wherein the dielectric film of said first capacitor component in one of said memory cells has a width, as measured in a direction parallel with said data line conductors, substantially equal to a gate length of said gate electrode of the transistor of said memory cell, wherein the dielectric film of said second capacitor component in one of said memory cells has a width, as measured in the direction parallel with said data line conductors, substantially equal to a width of said adjacent one word line conductor, wherein the dielectric films of the first and second capacitor components are physically separated from one another by a predetermined distance so as not to physically contact each other.

4 more elements

A semiconductor memory device comprising:

a semiconductor substrate;
a plurality of word line conductors formed over said substrate and a plurality of data line conductors formed over said substrate generally perpendicularly to said word line conductors;
and
a plurality of memory cells each provided at an intersection between one of said word line conductors and one of said data line conductors and including a cell selecting transistor and an information storage capacitor, said transistor having a pair of semiconductor regions formed in a surface portion of said substrate and a control electrode formed over said surface portion of said substrate between said pair of semiconductor regions and integral with one of said word line conductors, wherein in each of said memory cells
said capacitor includes a first capacitor component formed over said control electrode of the transistor and a second capacitor component formed over that one of said word line conductors which is adjacent to the one of said word line conductors integral with said control electrode of the transistor,
each of said first and second capacitor components having a common electrode, a storage electrode and a dielectric film sandwiched therebetween, the storage electrode being at a level higher than the common electrode in each of said first and second capacitor components, the storage electrodes of said first and second capacitor components being electrically connected with each other and with one of said semiconductor regions of the transistor, and
the other semiconductor region of the transistor is electrically connected with one of said data line conductors, wherein the storage and common electrodes and the dielectric film of said first capacitor component in one of said memory cells have a width, as measured in a direction parallel with said data line conductors, substantially equal to a gate length of said gate electrode of the transistor of said memory cell, and the storage and common electrodes and the dielectric film of said second capacitor component in one of said memory cells have a width, as measured in the direction parallel with said data line conductors substantially equal to that of said adjacent one word line conductor
wherein at least the storage electrodes of the first and second capacitor components are physically separated from one another by a predetermined distance so as not to physically contact each other.

5 more elements

A semiconductor memory device comprising:

a semiconductor substrate;
a plurality of word line conductors formed over said substrate and a plurality of data line conductors formed over said substrate generally perpendicularly to said word line conductors;
and
a plurality of memory cells each provided at an intersection between one of said word line conductors and one of said data line conductors and including a cell selecting transistor and an information storage capacitor, said transistor having a pair of semiconductor regions formed in a surface portion of said substrate and a control electrode formed over said surface portion of said substrate between said pair of semiconductor regions and integral with one of said word line conductors, wherein in each of said memory cells
said capacitor includes a first capacitor component formed over said control electrode of the transistor and a second capacitor component formed over that one of said word line conductors which is adjacent to the one of said word line conductors integral with said control electrode of the transistor,
each of said first and second capacitor components having a common electrode, a storage electrode and a dielectric film sandwiched therebetween, the storage electrode being at a level higher than the common electrode in each of said first and second capacitor components, the storage electrodes of said first and second capacitor components being electrically connected with each other and with one of said semiconductor regions of the transistors, and
the other semiconductor region of the transistor is electrically connected with one of said data line conductors, wherein the storage and common electrodes and the dielectric film of said first capacitor component in one of said memory cells have a width, as measured in a direction parallel with said data line conductors substantially equal to a gate length of said gate electrode of the transistor of said memory cell, and the storage and common electrodes and the dielectric film of said second capacitor component in one of said memory cells have a width, as measured in the direction parallel with said data line conductors, substantially equal to that of said adjacent one word line conductor,
wherein said storage electrodes of the first and second capacitor components are connected to one another and to one of said semiconductor regions of the transistor through a connection electrode which commonly connects each of the storage electrodes of the first and second capacitors with said one of the semiconductor regions of the transistor.

5 more elements

Dependencies are inferred from the claim text.