Ceramic heaters and heating devices using such ceramic heaters

A heating device comprising:

• a ceramic heater comprising:
• (i) a substrate consisting essentially of aluminum nitride;
• (ii) a resistive heating element buried in said substrate, said resistive heating element comprising a heat generator body comprised of metal having a thermal expansion coefficient not less than a thermal expansion coefficient of said substrate, a carbide layer provided on an outer surface of said heat generator body, and an oxide layer provided on an outer surface of said carbide layer;
• and (iii) terminals electrically connected to said resistive heating element, said terminals being buried in said substrate and being comprised of a metal having a thermal expansion coefficient not less than the thermal expansion coefficient of said substrate, wherein the thermal expansion coefficient of each of the terminals and said resistive heating element is in a range of 5.0.times.10.sup.-6 /.degree.C. to 8.3.times.10.sup.-6 /.degree.C.;
• and
• a cooling device for cooling said ceramic heater.