Stepper light control using movable blades
AssigneeHyundai Electronics Industries Co., Ltd.
InventorsChan Seob Cho, Hwan Soo Chang, Myung Gun Gil
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Abstract
The present invention discloses a light control means in a stepper. The light control means of the present invention has a twofold structure consisted of at least more than two blades which open a circuit pattern designed on a reticle; and a subblade which can close selectively a portion of the circuit pattern. The sub-blade is mounted above or below one of the at least more than two blades, and is movable in every directions in response to the instruction from the blade control system. Accordingly, the present invention provides a exposure process which can selectively cover only the dies that will be overlapped with the EBR gap of the wafer using sub-blade, thereby increasing the number of the net-die.
Claims3
A light control system in a stepper
- location near a pattern formed on a reticle comprising:
- at least first and second blades, spatially arranged relative to each other, operable to move relative to each other and to select a portion of said pattern on said reticle to be exposed to a light beam;
- and
- a sub-blade mounted relative to said first and second blades, operable to move around in every direction and to overlap at least said first and second blades, thereby blocking a selected area in said pattern from said liqht beam.
Dependencies are inferred from the claim text.