Methods for forming smooth diamond-based mesa structures

A method for forming a diamond-based structure comprising the steps of:

• providing a sacrificial substrate having a face;
• forming a plurality of diamond mesas on said face of said sacrificial substrate, wherein each of said diamond mesas has a respective interfacial surface adjacent said sacrificial substrate and a respective growth surface opposite said interfacial surface;
• bonding said growth surface of each of said diamond mesas to a transfer substrate;
• removing said sacrificial substrate from said diamond mesas to thereby expose said interfacial surfaces of said diamond mesas opposite said transfer substrate;
• and
• forming a layer of a piezoelectric material on said exposed interfacial surfaces of said diamond mesas opposite said transfer substrate.

A method for forming a diamond-based structure comprising the steps of:

• providing a sacrificial substrate having a face;
• forming a plurality of diamond mesas on said face of said sacrificial substrate, wherein each of said diamond mesas has a respective interfacial surface adjacent said sacrificial substrate and a respective growth surface opposite said interfacial surface;
• and
• bonding said growth surface of each of said diamond mesas to a transfer substrate;
• wherein said diamond mesa forming step comprises the steps of:
• depositing diamond at a first deposition rate;
• and
• then depositing diamond at a second deposition rate, wherein said second deposition rate is high relative to said first deposition rate.

A method for forming a diamond-based structure comprising the steps of:

• providing a sacrificial substrate having a face;
• forming a plurality of diamond mesas on said face of said sacrificial substrate, wherein each of said diamond mesas has a respective interfacial surface adjacent said sacrificial substrate and a respective growth surface opposite said interfacial surface;
• bonding said growth surface of each of said diamond mesas to a transfer substrate;
• wherein said diamond mesa forming step comprises the steps of:
• forming a plurality of diamond mesa growth regions having a high density of diamond nucleation sites;
• and
• selectively depositing diamond on said mesa growth regions having said high density of diamond nucleation sites.