Process of forming holes in a photosensitive resin layer to produce cathodes with microtips
AssigneeCommissariat a l'Energie Atomique
InventorsMichel Ida, Brigitte Montmayeul
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Abstract
A process for the formation of holes in a photosensitive resin layer, which can be applied to the production of electron sources having emissive cathodes with microtips and flat display screens. According to this process, a resin layer is exposed through a monolayer of balls transparent to an exposure light, with each ball focussing the light onto the resin layer and in this way bringing about the exposure of an area of said resin layer so that the thus exposed resin layer is developed.
Claims14
A process for the formation of holes in a positive, photosensitive resin layer by means of an exposure light, said process comprising the steps of:
- forming a monolayer of balls transparent to said exposure light and in direct contact with the resin layer;
- exposing the resin layer by the exposure light through the monolayer of balls, each of said balls concentrating said light at a contact point of said ball with the resin layer on which it is placed, thus bringing about an exposure of an area of said resin layer, the exposure light forming a parallel, collimated beam with a constant light intensity over the entire monolayer of balls;
- and
- developing the thus exposed resin layer leading to a formation of holes in said layer at a location of the exposed areas.
Dependencies are inferred from the claim text.