US 5,667,932 AGranted

Positive photoresist composition

AssigneeFuji Photo Film Co., Ltd.

InventorsKenichiro Sato, Kunihiko Kodama, Makoto Momota

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Abstract

Disclosed is a positive photoresist composition comprising an alkali-soluble resin and 1,2-naphthoquinonediazide-5-(and/or -4-)sulfonic esters of a polyhydroxy compound having a particular structure consisting of 5 aromatic rings linked linearly, in which each of the aromatic rings contains a hydroxyl group and the respective aromatic rings next to both the terminal rings contains a substituent group at the 5-position to the hydroxyl group thereof. The positive photoresist composition which has high resolution, low dependence of the resolution on film thickness, and broad latitude of development, leaves little development residue, and has very excellent storage stability without separation of photosensitive materials and generation of microgel (no increase in particle) with a lapse of time.

Claims4

Dependent claims

A positive photoresist composition comprising an alkali-soluble resin and at least one of 1,2-naphthoquinonediazide-5-(and/or -4-)sulfonic esters of polyhydroxy compounds represented by formula (I) or (II):

##STR3## wherein R.sub.1, R.sub.2, R.sub.1 ', and R.sub.2 ', which may be the same or different, each represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group, an alkoxy group, an acyl group, or a cycloalkyl group;
R.sub.3, R.sub.4, R.sub.3 ', and R.sub.4 ', which may be the same or different, each represents an alkyl group or a halogen atom;
R.sub.5, R.sub.6, R.sub.5 ', and R.sub.6 ', which may be the same or different, each represents a hydrogen atom, an alkyl group, or an alkoxy group;
R.sub.7, R.sub.8, R.sub.7 ', and R.sub.8 ', which may be the same or different, each represents an alkyl group, an alkoxy group, an alkenyl group, or a cycloalkyl group;
R.sub.9, R.sub.10, R.sub.9 ', and R.sub.10 ', which may be the same or different, each represents a hydrogen atom or an alkyl group;
R.sub.11 and R.sub. ' each represents a cycloalkyl group;
and k to n each represents an integer of from 0 to 3.

4 more elements

Dependencies are inferred from the claim text.