Method of making a chimney capacitor
AssigneeInternational Business Machines Corporation
InventorJohn Edward Cronin
Life of this patent
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Abstract
A chimney capacitor is formed having two plates, of which each is disposed above and contacts a corresponding electrical contact. The electrical contacts facilitate electrical access to the plates of the chimney capacitor. One of the electrical contacts may comprise part of a general wiring layer that may be used for both electrically accessing the capacitor and for general wiring within the IC chip. Formation of the chimney capacitor proceeds by first forming two electrical contacts on an integrated circuit ("IC") chip. A planar insulating layer is formed thereover, and the capacitor is formed at least partially within the planar insulating layer such that each plate is electrically connected to a corresponding electrical contact.
Claims14
A method for fabricating within an integrated circuit ("IC") chip a circuit structure that comprises a capacitor having an upper plate and a lower plate, said method comprising the steps of:
- (a) fabricating a first electrical contact and a second electrical contact as part of said IC chip;
- and
- (b) forming said capacitor such that said first electrical contact is at least partially disposed beneath and contacts said upper plate of said capacitor and said second electrical contact is at least partially disposed beneath and contacts said lower plate of said capacitor and said upper plate has a planar upper surface, wherein said first electrical contact and said second electrical contact facilitate electrical access to said capacitor.
The method of 12 wherein said capacitor forming step b) further comprises removing a portion of said dielectric layer between said inner portion of said upper plate and said cylindrical semiconductor layer to facilitate electrical conductivity therebetween.
Dependencies are inferred from the claim text.