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US 5,665,527 AGranted
Process for generating negative tone resist images utilizing carbon dioxide critical fluid
AssigneeInternational Business Machines Corporation
InventorsRobert David Allen, Gregory Michael Wallraff
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Abstract
The invention relates to a process for generating a negative tone resist image comprising the steps of (1) coating a substrate with a film of a polymeric composition comprising (i) a polymer, (ii) a photosensitive acid generator, and (iii) acid labile groups; (2) imagewise exposing the film to radiation to generate free acid; and (3) developing the image with critical fluid.
Claims6
A process for generating a negative tone resist image comprising the steps of:
- (a) coating a substrate with a polymeric film comprising:
- (i) a polymer having pendant acid labile groups, the polymer is a halogenated polymer or a polymer having a pendant alkylsiloxy ester substituent or a pendant halogenated alkyl ester substituent, and
- (ii) a photosensitive acid generator,
- (b) imagewise exposing the film to radiation to generate free acid;
- and
- (c) developing the negative tone image with carbon dioxide critical fluid.
3 more elements
Dependencies are inferred from the claim text.