Acidic ion exchange resin as a catalyst to synthesize a novolak resin and photoresist composition therefrom
AssigneeHoechst Celanese Corporation
InventorsM. Dalil Rahman, Daniel P. Aubin, Elaine G. Kokinda, Dana L. Durham
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Abstract
The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having consistent molecular weight and a very low level of metal ions, utilizing a solid acid condensation catalyst. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.
Claims8
A method for producing a water insoluble, aqueous alkali soluble novolak resin comprising:
- a) condensing formaldehyde with one or more phenolic compounds, in the presence of a solid acid catalyst, said catalyst being a solid acid catalyst which can be separated by filtration after the condensation reaction, wherein said acid catalyst is an acidic ion exchange resin which is insoluble in substituted phenols, formaldehyde, propylene glycol methyl ether acetate, dipropylene glycol methyl ether, and 3-methoxy-3-methyl butanol;
- b) after the condensation, removing the solid catalyst;
- and
- c) removing the unreacted phenolic compounds and thereby producing a water insoluble, aqueous alkali soluble, film forming novolak resin having a sodium and iron ion level of less than 200 ppb each.
A method for producing a positive photoresist composition comprising:
- a) condensing formaldehyde with one or more phenolic compounds, in the presence of an acid catalyst, said catalyst being a solid acid catalyst which can be separated by filtration after the condensation reaction, wherein said acid catalyst is an acidic ion exchange resin which is insoluble in substituted phenols, formaldehyde, propylene glycol methyl ether acetate, dipropylene glycol methyl ether, and 3-methoxy-3-methyl butanol;
- b) after the condensation, removing the catalyst;
- and
- c) removing the unreacted phenolic compounds and thereby producing a water insoluble, aqueous alkali soluble, film forming novolak resin having a sodium and iron ion level of less than 200 ppb each;
- d) providing an admixture of:
- 1)a photosensitive component in an amount sufficient to photosensitize a photoresist composition;
- 2) the water insoluble, aqueous alkali soluble, film forming novolak resin of c) and 3) a suitable photoresist solvent, and thereby forming a photoresist composition.
A method for producing a semiconductor device by producing a photo-image on a suitable substrate comprising:
- a) condensing formaldehyde with one or more phenolic compounds, in the presence of an acid catalyst, said catalyst being a solid acid catalyst which can be separated by filtration after the condensation reaction, wherein said acid catalyst is an acidic ion exchange resin which is insoluble in substituted phenols, formaldehyde, propylene glycol methyl ether acetate, dipropylene glycol methyl ether, and 3-methoxy-3-methyl butanol;
- b) after the condensation, removing the catalyst;
- and
- c) removing the unreacted phenolic compounds and thereby producing a water insoluble, aqueous alkali soluble, film forming novolak resin having a sodium and iron ion level of less than 200 ppb each;
- d) providing an admixture of:
- 1) a photosensitive component in an amount sufficient to photosensitize a photoresist composition;
- 2) the water insoluble, aqueous alkali soluble, film forming novolak resin of c) and 3) a suitable photoresist solvent and thereby forming a photoresist composition;
- e) costing a suitable substrate with the photoresist composition;
- f) heat treating the coated substrate of e) until substantially all of the photoresist solvent is removed;
- image-wise exposing the photosensitive composition and removing the image-wise exposed areas of such composition with a suitable developer, such as an aqueous alkaline developer.
Dependencies are inferred from the claim text.