Ceramic electrostatic chuck with built-in heater
AssigneesShin-Etsu Chemical Co., Ltd., Tokyo Electoron Limited
InventorsNobuo Kawada, Shoji Kano, Koji Hagiwara, Nobuo Arai, Junichi Arami, Kenji Ishikawa
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Abstract
A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.
Claims6
A ceramic electrostatic chuck having a built-in heater comprising a supporting substrate having opposite first and second surfaces, a heat generating layer of an electroconductive ceramic bonded to the first surface, an electrode layer bonded to the second surface so as to sandwich the substrate between the heat generating layer and the electrode layer, and a covering layer of an electrically insulating ceramic covering said electrode layer and said heat generating layer, wherein said electrode layer and said heat generating layer have a surface roughness Rmax of 5 .mu.m or larger.
Dependencies are inferred from the claim text.