Method of making superhard mechanical microstructures
AssigneeAdagio Associates, Inc.
InventorArmand P. Neukermans
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Abstract
The forming of superhard, durable and inert mechanical microstructures, such as tips for atomic force microscopy and field emission, membranes, hinges, actuators, and sensors requires micromachining of silicon or polysilicon. The microstructures are then reacted with a hydrocarbon or ammonia gas, at a temperature in the range of 700.degree. C. to 1100.degree. C. and in partial vacuum conditions for several minutes. Gases such as methane, ethane, or acetylene will convert the surface layers to SiC, which is useful for its conductive properties, while ammonia gas will convert the surface layers to Si.sub.3 N.sub.4, which is useful for its insulative properties. Thus, the converted material will have improved physical, mechanical, chemical and electrical properties.
Claims18
A method of making superhard mechanical microstructures ("MEMS") comprising steps of:
- providing a solid substrate made of a material selected from a group consisting of silicon and polysilicon;
- micromachining the solid substrate to create MEMS having features;
- and
- reacting at least a portion of the MEMS at an elevated temperature with a gas having molecules that includes atoms selected from a group consisting of nitrogen and carbon, such that the atoms diffuse into a surface layer of the MEMS, thereby forming in the surface layer of the MEMS a compound that includes silicon and the diffused atoms, the temperature being selected such that the features formed on the MEMS during micromachining are preserved essentially unchanged in shape.
Dependencies are inferred from the claim text.