US 5,656,812 A · Electron probe microanalyzer and X-ray analysis using same

Abstract

An electron probe microanalyzer is capable of easily carrying out a precise x-ray analysis of a specimen whose surface is not flat or smooth, by satisfying the focusing conditions. A region to be analyzed on the specimen surface is divided into a given number of subregions by division lines. The heights, or z-coordinates, of the intersections of the division lines are measured. The z-coordinates are stored in a memory, together with their x- and y-coordinates. A unit plane approximating each subregion is determined from the x-, y-, and z-coordinates of the intersections. A plurality of analysis points are established in each determined unit plane. The heights of the analysis points are calculated, using a mathematical formula which defines the positions of the analysis points and the unit planes. In making an x-ray analysis of each analysis point, heights of the specimen are determined from the calculated z-coordinates.

Claims12

Dependent claims

A method of x-ray analysis, using an electron probe microanalyzer for directing an electron beam at a specimen and detecting characteristic x-rays emanating from said specimen by a spectrometer to make an elemental analysis of a surface of said specimen, said method comprising the steps of:

specifying a region to be analyzed on the surface of said specimen;
dividing the specified region into a plurality of subregions by division lines;
finding z-coordinates of intersections of said division lines;
storing the found z-coordinates in a memory, together with x- and y-coordinates of said intersections;
finding z-coordinates of a plurality of analysis points established within each of said subregions from the x-, y-, and z-coordinates of intersections surrounding said subregions and from x- and y-coordinates of said analysis points;
determining heights of said specimen from the found z-coordinates;
and
carrying out an x-ray analysis of each of said analysis points while substantially satisfying focusing conditions for said spectrometer.

5 more elements

An electron probe microanalyzer for directing an electron beam at a specimen and detecting characteristic x-rays emanating from the specimen by a spectrometer to make an elemental analysis of a surface of said specimen, said electron probe microanalyzer comprising:

an observation means for producing a visible image to a user to observe the surface of said specimen;
a position-specifying means permitting the user to specify a region to be analyzed on the specimen surface within the visible image produced by the observation means;
a division means for dividing the specified region into a plurality of subregions by division lines;
a height-measuring means for measuring heights, or z-coordinates, of a plurality of intersections created by said division lines;
a means for bringing said intersections successively into a position where the heights are measured by the height-measuring means;
a storage means for storing information about x- and y-coordinates of said intersections and information about the heights measured by the height-measuring means;
an arithmetic means for finding information about heights of analysis points from the information about positions heights of the intersections surrounding each subregion when an x-ray analysis is made of each of said analysis points established within each subregion;
and
a height-establishing means for establishing heights of the specimen according to the found z-coordinates and making an x-ray analysis of each of said analysis points while substantially satisfying focusing conditions for the spectrometer.

6 more elements

Dependencies are inferred from the claim text.

Electron probe microanalyzer and X-ray analysis using same

Life of this patent

Electron probe microanalyzer and X-ray analysis using same

Life of this patent

Abstract

Claims12