Scanning apparatus linearization and calibration system

A system for linearization and calibration of an electromechanical scanning apparatus for scanning topography of a sample, said system comprising:

• a microscope for producing image data of a sample;
• a fixed mount for mounting said microscope;
• a sample stage for said sample;
• a scanner mounted for displacement of said sample stage relative to said microscope;
• a deflecting member mounted between said scanner and said fixed mount adapted to undergo deflection in response to displacement of said scanner;
• means attached to said deflecting member for measuring said deflection of said deflecting member and for generating an output deflection signal indicative of an amount of deflection of said deflecting member;
• and
• means for correcting distortions in said image data based upon said output deflection signal.

A method for linearization and calibration of an electromechanical scanning apparatus for scanning a sample stage for a sample relative to a microscope, said scanning apparatus including a fixed mount for mounting said microscope, a scanner mounted for displacement of the scanner relative to said fixed mount, a deflecting member mounted between said scanner and said fixed mount, and means for measuring deflection of the deflecting member, the steps of the method comprising:

• scanning said sample stage relative to said microscope;
• generating a command signal for scanning said sample stage a desired displacement;
• displacing said sample stage relative to said microscope in response to said command signal;
• measuring said deflection of said deflecting member and generating an output deflection signal indicative of an amount of deflection of said deflecting member;
• and
• providing a closed loop feedback control signal to said scanner derived from said output deflection signal and said command signal.

A method for linearization and calibration of an electromechanical scanning apparatus, said electromechanical scanning apparatus including a microscope for producing image data of a sample, a fixed mount for mounting said microscope, a sample stage for said sample, a scanner mounted for displacement of said sample stage relative to said microscope, and a deflecting member mounted between said scanner and said fixed mount, the steps of said method comprising:

• generating a command signal for a desired displacement of said scanner;
• displacing said scanner relative to said fixed mount in response to said command signal;
• measuring said deflection of said deflecting member and generating an output deflection signal indicative of an amount of deflection of said deflecting member;
• and
• correcting distortions in said image data based upon said output deflection signal.