Barrier seal for electrostatic chuck
AssigneeApplied Materials, Inc.
InventorsJoseph Salfelder, Dennis Grimard, John F. Cameron, Chandra Deshpandey, Robert Ryan, Michael G. Chafin
Life of this patent
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Abstract
An erosion resistant electrostatic chuck 20 for holding a substrate 45 having a peripheral edge 50, in an erosive environment, comprises an electrostatic member 25 including (i) an electrode 30, and (ii) an insulator 35 covering the electrode. A barrier 55 is circumferentially disposed about the electrostatic member 25. The barrier 55 comprises a first contact surface 60 capable of being pressed against the peripheral edge 50 of the substrate 45 to form a seal around the substrate 45 to reduce exposure of the electrostatic member 25 of the chuck 20 to the erosive environment.
Claims36
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge, in an erosive environment, the chuck comprising:
- (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode;
- and
- (b) a barrier circumferentially disposed about the electrostatic member, the barrier comprising (i) a planar base suitable for resting on the periphery of the support, and (ii) an arm extending upwardly from the base, the arm comprising a first contact surface capable of being conformally pressed against the peripheral edge of the substrate to form a seal between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge in an erosive environment, the chuck comprising:
- (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode;
- (b) a support for supporting the electrostatic member, the support having a periphery below the peripheral edge of the substrate;
- and
- (c) a barrier disposed on the periphery of the support, the barrier having (i) a cantilever arm including a first contact surface capable of being pressed against the peripheral edge of the substrate, and (ii) a base supporting the cantilever arm, the base having a second contact surface capable of being pressed against the periphery of the support, so that the barrier can form a seal between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
An erosion resistant electrostatic chuck for holding a substrate having a peripheral edge in an erosive environment, the chuck comprising:
- (a) an electrostatic member for electrostatically holding the substrate, the electrostatic member comprising (i) an electrode, and (ii) an insulator covering the electrode;
- and
- (b) a barrier ring circumferentially disposed about the electrostatic member, the barrier ring having an upwardly extending cantilever arm sufficiently resilient and conformal to form a seal against the peripheral edge of the substrate under application of the electrostatic force generated by the electrostatic member, without dislodging the electrostatically held substrate, to reduce exposure of the electrostatic member to the erosive environment.
A method of enhancing the erosion resistance of an electrostatic chuck in an erosive environment, the chuck comprising (i) a electrostatic member capable of electrostatically holding a substrate, and (ii) a support for supporting the electrostatic member, the method comprising the steps of:
- (a) positioning a barrier circumferentially about the electrostatic member, the barrier comprising (i) a base resting on the support, and (ii) a cantilever arm extending from the base, the cantilever arm having a conformal contact surface capable of forming a seal against the substrate;
- (b) placing a substrate on the electrostatic member so that a peripheral edge of the substrate contacts the conformal contact surface of the barrier;
- and
- (c) compressing the cantilever arm of the barrier using the peripheral edge of the substrate, by applying a voltage to the electrostatic member to electrostatically press the substrate against the conformal contact surface of the barrier, to form a seal that extends between the substrate and the support to reduce exposure of the electrostatic member to the erosive environment.
A method of enhancing the erosion resistance of an electrostatic chuck in an erosive environment, the chuck comprising (i) a electrostatic member capable of electrostatically holding a substrate, the electrostatic member comprising coolant grooves for holding coolant at a pressure below the substrate, and (ii) a support for supporting the electrostatic member, the method comprising the steps of:
- (a) positioning a barrier circumferentially about the electrostatic member, the barrier comprising (i) a base resting on the support, and (ii) a cantilever arm extending from the base, the cantilever arm having a conformal contact surface capable of forming a seal against the substrate;
- (b) placing a substrate on the electrostatic member so that a peripheral edge of the substrate contacts the conformal contact surface of the barrier;
- and
- (c) compressing the cantilever arm of the barrier using the peripheral edge of the substrate, by applying a voltage to the electrostatic member to electrostatically press the substrate against the conformal contact surface of the barrier to form a seal that extends between the substrate and the support, the seal provided to (i) reduce exposure of the electrostatic member to the erosive environment, and (ii) reduce leakage of coolant from the coolant grooves below the substrate.
Dependencies are inferred from the claim text.