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US 5,636,003 AGranted
Illumination optical apparatus and scanning exposure apparatus
AssigneeNikon Corporation
InventorsOsamu Tanitsu, Takashi Mori, Noriaki Yamamoto
Life of this patent
Estimating the term…
Abstract
An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.
Claims42
An illumination optical apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially linearly arranged in at least one line, based on the beam from said light supply means;
- an optical integrator having a plurality of lens elements for forming a plurality of light source images, based on the beam from said light-source-image forming means, said lens elements having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length, said lens elements having a same refracting power both in the direction of the longer side of the rectangular cross section and in the direction of the shorter side thereof;
- and
- a first relay optical system disposed between said light-source-image forming means and said optical integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said optical integrator
- said light supply means including;
- a light source system for emitting light having a beam cross section of substantially square or circle;
- light source changing means for forming a plurality of light source images, based on the light from said light source system;
- and
- a second relay optical system located between said light source changing means and said light-source-image forming means, for making a position of the light source images formed by said light source changing means conjugate with a position of the light source images formed by said light-source-image forming means.
7 more elements
An illumination optical apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially linearly arranged in at least one line, based on the beam from said light supply means;
- an internal reflection type integrator having two reflection planes parallel to each other for forming a plurality of light source images, based on the beam from said light-source-image forming means, said internal reflection type integrator having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length;
- and
- a first relay optical system disposed between said light-source-image forming means and said internal reflection type integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said internal reflection type integrator,
- said light supply means including;
- a light source system for emitting light having a beam cross section of substantially square or circle;
- light source changing means for forming a plurality of light source images, based on the light from said light source system;
- and
- a second relay optical system located between said light source changing means and said light-source-image forming means, for making a position of the light source images formed by said light source changing means conjugate with a position of the light source images formed by said light-source-image forming means.
7 more elements
An illumination optical apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially linearly arranged in at least one line, based on the beam from said light supply means;
- an optical integrator having a plurality of lens elements for forming a plurality of light source images, based on the beam from said light-source-image forming means, said lens elements having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length, said lens elements having a same refracting power both in the direction of the longer side of the rectangular cross section and in the direction of the shorter side thereof;
- and
- a relay optical system disposed between said light-source-image forming means and said optical integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said optical integrator,
- said light supply means comprising:
- a collector mirror having an ellipsoidal surface of revolution;
- a light source located at one focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror;
- and
- a collimator lens for converting light collected by said collector mirror into substantially parallel beams.
7 more elements
An illumination optical apparatus comprising;
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially linearly arranged in at least one line, based on the beam from said light supply means;
- an internal reflection type integrator having two reflection planes parallel to each other for forming a plurality of light source images, based on the beam from said light-source-image forming means, said internal reflection type integrator having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length;
- and
- a relay optical system disposed between said light-source-image forming means and said internal reflection type integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said internal reflection type integrator,wherein said light supply means comprising:
- a collector mirror having an ellipsoidal surface of revolution;
- a light source located at one focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror;
- and
- a collimator lens for converting light collected by said collector mirror into substantially parallel beams.
6 more elements
An illumination optical apparatus comprising;
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially linealy arranged in at least one line, based on the beam from said light supply means;
- an optical integrator having a plurality of lens elements for forming a plurality of light source images, based on the beam from said light-source-image forming means, said lens elements having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length, said lens elements having a same refracting power both in the direction of the longer side of the rectangular cross section and in the direction of the shorter side thereof;
- and
- a relay optical system disposed between said light-source-image forming means and said optical integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said optical integrator,
- said light supply means comprising:
- a collector mirror having an ellipsoidal surface of revolution;
- and
- a light source located at a first focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror.
6 more elements
An illumination optical apparatus comprising;
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substantially linealy arranged in at least one line, based on the beam from said light supply means;
- an internal reflection type integrator having two reflection planes parallel to each other for forming a plurality of light source images, based on the beam from said light-source-image forming means, said internal reflection type integrator having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length;
- and
- a relay optical system disposed between said light-source-image forming means and said internal reflection type integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said internal reflection type integrator,
- said light supply means comprising:
- a collector mirror having an ellipsoidal surface of revolution;
- and
- a light source located at a first focal point of said ellipsoidal surface of revolution so that light emitted therefrom is reflected and collected by said collector mirror.
6 more elements
A scanning exposure apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially linerly arranged in at least one line, based on the beam from said light supply means;
- an optical integrator having a plurality of lens elements for forming a plurality of light source images, based on the beam from said light-source-image forming means, said lens elements having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length, said lens elements having a same refracting power both in the direction of the longer side of the rectangular cross section and in the direction of the shorter side thereof;
- a first relay optical system disposed between said light-source-image forming means and said optical integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said optical integrator;
- a condenser optical system for condensing the beam from said optical integrator to illuminate a surface of a reticle;
- a reticle stage for moving said reticle in a direction parallel to said surface of reticle;
- a wafer stage for carrying a wafer on which integrated circuits are to be formed, and moving said wafer in a direction parallel to a surface of said wafer;
- and
- a projection optical system disposed between said reticle and said wafer, for making a position at which said reticle is located conjugate with a position at which said wafer is located,
- said light supply means including;
- a light source system for emitting light having a beam cross section of substantially square or circle;
- light source changing means for forming a plurality of light source images, based on the light from said light source system;
- and
- a second relay optical system located between said light source changing means and said light-source-image forming means, for making a position of the light source images formed by said light source changing means conjugate with a position of the light source images formed by said light-source-image forming means.
11 more elements
A scanning exposure apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images which are substatially and linearly arranged in at least one line, based on the beam from said light supply means;
- an internal reflection type integrator having two reflection planes parallel to each other for forming a plurality of light source images, based on the beam from said light-source-image forming means, said internal reflection type integrator having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length;
- a relay optical system disposed between said light-source-image forming means and said internal reflection type integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said internal reflection type integrator;
- a condenser optical system for condensing the beam from said internal reflection type integrator to illuminate a surface of a reticle;
- a reticle stage for moving said reticle in a direction parallel to said surface of reticle;
- a wafer stage for carrying a wafer on which integrated circuits are to be formed, and moving said wafer in a direction parallel to a surface of said wafer;
- and
- a projection optical system disposed between said reticle and said wafer, for making a position at which said reticle is located conjugate with a position at which said wafer is located,
- said light supply means including;
- a light source system for emitting light having a beam cross section of substantially square or circle;
- light source changing means for forming a plurality of light source images, based on the light from said light source system;
- and
- a second relay optical system located between said light source changing means and said light-source-image forming means, for making a position of the light source images formed by said light source changing means conjugate with a position of the light source images formed by said light-source-image forming means.
11 more elements
An illumination optical apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images in a substantially linear arrangement, based on the beam from said light supply means;
- an optical integrator having a plurality of lens elements for forming a plurality of light source images, based on the beam from said light-source-image forming means, said lens elements having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length, said lens elements having a same refracting power both in the direction of the longer side of the rectangular cross section and in the direction of the shorter side thereof;
- and
- a relay optical system disposed between said light-source-image forming means and said optical integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said optical integrator.
2 more elements
An illumination optical apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images in a substantially linear arrangement, based on the beam from said light supply means;
- an internal reflection type integrator having two reflection planes parallel to each other for forming a plurality of light source images, based on the beam from said light-source-image forming means, said internal reflection type integrator having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length;
- and
- a relay optical system disposed between said light-source-image forming means and said internal reflection type integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said internal reflection type integrator.
2 more elements
A scanning exposure apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images in a substantially linear arrangement, based on the beam from said light supply means;
- an optical integrator having a plurality of lens elements for forming a plurality of light source images, based on the beam from said light-source-image forming means, said lens elements having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length, said lens elements having a same refracting power both in the direction of the longer side of the rectangular cross section and in the direction of the shorter side thereof;
- a relay optical system disposed between said light-source-image forming means and said optical integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said optical integrator;
- a condenser optical system for condensing the beam from said optical integrator to illuminate a surface of a reticle;
- a reticle stage for moving said reticle in a direction parallel to said surface of reticle;
- a wafer stage for carrying a wafer on which integrated circuits are to be formed, and moving said wafer in a direction parallel to a surface of said wafer;
- and
- a projection optical system disposed between said reticle and said wafer, for making a position at which said reticle is located conjugate with a position at which said wafer is located.
6 more elements
A scanning exposure apparatus comprising:
- a light supply means for supplying a beam;
- a light-source-image forming means for forming a plurality of light source images in a substantially linear arrangement, based on the beam from said light supply means;
- an internal reflection type integrator having two reflection planes parallel to each other for forming a plurality of light source images, based on the beam from said light-source-image forming means, said internal reflection type integrator having a rectangular cross section, two sides adjacent to each other of said rectangular cross section being different in length;
- a relay optical system disposed between said light-source-image forming means and said internal reflection type integrator, for making a position of the light source images formed by said light-source-image forming means conjugate with a position of the light source images formed by said internal reflection type integrator;
- a condenser optical system for condensing the beam from said internal reflection type integrator to illuminate a surface of a reticle
- a reticle stage for moving said reticle in a direction parallel to said surface of reticle;
- a wafer stage for carrying a wafer on which integrated circuits are to be formed, and moving said wafer in a direction parallel to a surface of said wafer;
- and
- a projection optical system disposed between said reticle and said wafer, for making a position at which said reticle is located conjugate with a position at which said wafer is located.
6 more elements
Dependencies are inferred from the claim text.