Method of replenishing electroless gold plating baths
AssigneeInternational Business Machines Corporation
InventorsDonald F. Canaperi, Rangarajan Jagannathan, Mahadevaiyer Krishnan
Life of this patent
Estimating the term…
Abstract
A replenishing solution for a cyanide-based electroless gold plating bath. The solution includes a gold(III) halide such as gold chloride, gold bromide, tetrachloroaurate (and its sodium, potassium, and ammonium salts), and tetrabromoaurate (and its sodium, potassium, and ammonium salts). The replenishing solution also may include an alkali (such as potassium hydroxide, sodium hydroxide, and ammonium hydroxide) to maintain the pH of the solution between 8 and 14. Also provided is a method of replenishing a cyanide-based electroless gold plating bath with the solution of the present invention.
Claims16
A method of replenishing a cyanide-based electroless gold plating bath comprising the steps of:
- providing a cyanide-based electroless gold plating bath having a source of gold including cyanide, a stabilizer, and pH adjuster which maintains the pH of the bath between 11 and 14;
- depositing gold on a substrate using the bath, thereby removing gold from the bath;
- providing a replenishing solution including a gold halide and an alkali hydroxide, which reacts with said cyanide to form a gold halide-hydroxide complex including said cyanide, said replenishing solution having a pH between 8 and 14;
- determining the amount of gold removed from the bath;
- and
- adding a sufficient amount of the replenishing solution to the bath to replace the gold removed from the bath during the depositing step without increasing the free cyanide concentration level in the bath above the initial level in the bath.
A method of replenishing a cyanide-based electroless gold plating bath comprising the steps of:
- providing a cyanide-based electroless gold plating bath having a source of gold selected from the group consisting of potassium autocyanide and sodium aurocyanide, an amine borane reducing agent, a stabilizer selected from the group consisting of potassium cyanide and sodium cyanide, and a pH adjuster selected from the group consisting of sodium hydroxide and potassium hydroxide which maintains the pH of the bath between 11 and 14;
- depositing gold on a substrate using the bath, thereby removing gold from the bath;
- providing a replenishing solution including a gold (III) halide and an alkali hydroxide, which reacts with said cyanide to form a gold halide-hydroxide complex including said cyanide, wherein:
- (a) said gold (III) halide is selected from the group consisting of gold chloride;
- gold bromide;
- tetrachloroaurate and its sodium, potassium, and ammonium salts;
- and tetrabromoaurate and its sodium, potassium, and ammonium salts, and
- (b) said alkali hydroxide is selected from the group consisting of potassium hydroxide, sodium hydroxide, and ammonium hydroxide, said replenishing solution having a pH between 8 and 14;
- determining the mount of gold removed from the bath;
- and adding a sufficient amount of the replenishing solution to the bath to replace the gold removed from the bath during the depositing step without increasing the free cyanide concentration level in tile bath above the initial level in the bath.
A method of replenishing a cyanide-based electroless gold plating bath comprising the steps of:
- providing an electroless gold plating bath having potassium autocyanide, a dimethylaminoborane reducing agent, a potassium cyanide stabilizer, and a potassium hydroxide pH adjuster which maintains the pH of the bath between 11 and 14;
- depositing gold on a substrate using the bath at a temperature of about 65.degree. C., while agitating the bath thereby removing gold from the bath;
- providing a replenishing solution comprising tetrachloroaurate and potassium hydroxide, wherein said replenishing solution has a pH between 8 and 14 and reacts with said cyanide to form a gold halide-hydroxide complex including said cyanide;
- determining the amount of gold removed from the bath;
- adding, at a temperature of about 50.degree. C., a sufficient amount of the replenishing solution to tile bath to replace the gold removed from the bath during the deposition step without increasing the free cyanide concentration level in the bath above the initial level in the bath;
- and
- filtering the replenished bath.
Dependencies are inferred from the claim text.