Method for producing thin film and apparatus therefor

A method for producing a thin film, comprising the steps of:

• placing a substrate having a surface for receiving the thin film on a substrate holder disposed within a thin film production chamber, the production chamber being connected by an arm to a rotatable member;
• rotating the rotatable member to generate a centrifugal force thereby creating a gravity field throughout the production chamber having a direction toward the surface of the substrate;
• heating the substrate;
• and
• supplying a raw gas of a material to be deposited as the thin film on the substrate via piping disposed within the rotatable member and the arm thereby accelerating the gas toward the surface of the substrate in a direction of the gravity field for decomposing the gas whereby the material to be deposited is deposited on the surface of the substrate as the thin film.

An apparatus for producing a thin film comprising:

• a rotatable member;
• a thin film production chamber connected to the rotatable member;
• an arm interconnecting the rotatable member and the production chamber;
• a substrate holder disposed within the production chamber, the substrate bolder being adapted to receive a substrate thereon;
• means connected to the rotatable member for rotating the rotatable member to generate a centrifugal force thereby creating a gravity field throughout the production chamber having a direction toward the surface of the substrate when the substrate is received on the substrate holder;
• means disposed in the production chamber for heating the substrate when the substrate is received on the substrate holder;
• and
• means disposed in the production chamber for heating and evaporating a material to be deposited on the surface of the substrate when the substrate is received on the substrate holder thereby accelerating the material to be deposited toward the surface of the substrate in a direction of the gravity field, whereby the material to be deposited is deposited on the surface of the substrate as the thin film.

An apparatus for producing a thin film comprising:

• a rotatable member;
• a thin film production chamber connected to the rotatable member;
• an arm interconnecting the rotatable member and the production chamber;
• a substrate holder disposed within the production chamber, the substrate holder being adapted to receive a substrate thereon;
• means connected to the rotatable member for rotating the rotatable member to generate a centrifugal force thereby creating a gravity field throughout the production chamber having a direction toward the surface of the substrate when the substrate is received on the substrate holder;
• means disposed in the production chamber for heating the substrate when the substrate is received on the substrate holder;
• and
• piping disposed within the rotatable member and the arm for supplying a raw gas of a material to be deposited as the thin film on the surface of the substrate when the substrate is received on the substrate holder thereby accelerating the gas toward the surface of the substrate in a direction of the gravity field for decomposing the gas whereby the material to be deposited is deposited on the surface of the substrate as the thin film.