Process for removing plastics from microstructures
AssigneeMicroParts GmbH
InventorHolger Reinecke
Life of this patent
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Abstract
A process for removing plastics from microstructures is disclosed. The metallic microstructure is treated with a high-boiling fluid at a temperature above 140.degree. C. for 10 to 90 minutes and subsequently rinsed with water. Suitable fluids include oligomers of ethylene glycol, short-chain diols and dicarboxylic acid esters. Such fluids do not attack the metal and prevent the plastics which are being removed from swelling.
Claims14
A process for removing plastics from a metallic microstructure element, comprising treating a metallic microstructure element having an aspect ratio (height/width) of at least 4 included in a fusible or infusible plastic layer with a fluid consisting essentially of a polar solvent which does not substantially swell the plastic, at a temperature above 140.degree. C.
A process for removing plastics from a metallic microstructure element, comprising treating a metallic microstructure element having an aspect ratio (height/width) of at least 4 included in a fusible or infusible plastic layer with a fluid consisting of a polar solvent which does not substantially swell the plastic and a metal salt or a free-radical former, at a temperature above 140.degree. C.
Dependencies are inferred from the claim text.