Tilting positioner for a micropositioning device
AssigneeLucent Technologies Inc.
InventorsJoseph E. Griffith, Rafael N. Kleiman
Life of this patent
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Abstract
A scanning probe microscope positioner including an elongated rigid member which is controllably tilted in a predictable manner. One end of the rigid member is subjected to differential motion on opposite sides of its longitudinal axis so as to cause its opposite end to partake of lateral displacement which is a magnification of the differential motion. By a careful selection of component materials and sizes, inherent thermal compensation can be attained.
Claims21
A positioner for a micropositioning device to control one dimensional horizontal movement between a pair of elements, the positioner comprising:
- a rigid elongated member having a first free end and a second pivot end, said member being coupled at said free end to a first of said elements so as to prevent relative horizontal movement therebetween, and said member having a longitudinal axis extending from said free end to said pivot end;
- a pair of rigid intermediate support members;
- a first pivotal coupling on a first side of said longitudinal axis for pivotably coupling the pivot end of said elongated member to a first of said support members;
- a second pivotal coupling across said longitudinal axis from said first pivotal coupling for pivotably coupling the pivot end of said elongated member to a second of said support members;
- a first small motion transducer actuator having a first end coupled to said first support member so as to prevent relative movement therebetween and an opposite end coupled to a second of said elements so as to prevent relative movement therebetween, said first actuator being controllable for effecting relative movement between said first support member and said second element so as to cause said elongated member to tilt;
- a second small motion transducer actuator having a first end coupled to said second support member so as to prevent relative movement therebetween and an opposite end coupled to the second of said elements so as to prevent relative movement therebetween, said second actuator being controllable for effecting relative movement between said second support member and said second element so as to cause said elongated member to tilt;
- and
- control means for selectively energizing said first and second actuators to cause differential motion of said first and second support members;
- whereby said elongated member is caused to tilt in a controlled manner to move the elongated member free end along a tilt line.
A positioner for a micropositioning device to control two dimensional horizontal movement between a pair of elements, the positioner comprising:
- a rigid elongated member having a first free end and a second pivot end, said member being coupled at said free end to a first of said elements so as to prevent relative horizontal movement therebetween, and said member having a longitudinal axis extending from said free end to said pivot end;
- three rigid intermediate support members;
- three pivotal couplings each for pivotably coupling the pivot end of said elongated member to a respective one of said support members, said pivotal couplings being arranged in a triangular configuration about said longitudinal axis;
- three substantially parallel small motion transducer actuators each having a first end coupled to a respective one of said support members so as to prevent relative movement therebetween and an opposite end coupled to a second of said elements so as to prevent relative movement therebetween, each of said actuators being controllable for effecting relative movement between the respective one of said support members and said second element so as to cause said elongated member to tilt;
- and
- control means for selectively energizing said actuators to cause differential motion of said support members;
- whereby said elongated member is caused to tilt in a controlled manner to move the elongated member free end.
Dependencies are inferred from the claim text.