US 5,627,110 A · Method for eliminating window mask process in the fabrication of a semiconductor wafer when chemical-mechanical polish planarization is used

Abstract

A method of fabricating semiconductor devices which eliminates the need to use additional window mask process to expose topographical marks, such as alignment targets, on a wafer when chemical-mechanical polish planarization technique are used to substantially planarize the surface of the wafer prior to metal deposition. The method comprises (a) depositing a first removable layer on the wafer; (b) removing a portion of the first removable layer to form a large window around the first topographical mark and to retain an area of the first removable layer around the window; (c) forming an island of material within the: window and over the first topographical mark, wherein the island having a top surface of a second topographical mark replicating the first topographical mark; (d) depositing a second removable layer over the wafer including over the area and the island; (e) chemical-mechanical polishing the second removable layer to substantially planarize the second removable layer; and (f) removing the second removable layer deposited over the area and the island to expose the second topographical mark. The outer dimension of the window is large enough so that the upper surface of the second topographical mark and the upper surface of the material located in the remaining area on the wafer are of approximately equal spacing from the substantially planarized second removable layer. Accordingly, additional window mask process can be eliminated because one etch process, such as a contact etch, will be sufficient to expose the second topographical mark.

Claims28

Dependent claims

A method of replicating a first topographical mark on a wafer, comprising:

(a) depositing a first removable insulative layer on the wafer;
(b) removing a portion of said first removable insulative layer to form a large window relative to and around said first topographical mark and to retain an area of said first removable insulative layer around said large window;
(c) forming an island of conductive material within said window and over said first topographical mark, said island having a top surface of a second topographical mark replicating said first topographical mark;
(d) depositing a second removable insulative layer over the wafer including over said area and said island;
(e) chemical-mechanical polishing said second removable insulative layer to planarize said second removable insularire layer;
and
(f) removing said second removable insulative layer deposited over said area and said island to expose said second topographical mark.

4 more elements

A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a first alignment target having a non-planar upper surface, the method comprising the steps of:

(a) forming a first layer of insulative film on the wafer, said first layer of insulative film having an upper surface;
(b) forming a first larvae opening relative to and around said first alignment target on said first layer of insulative film;
(c) forming and patterning a first layer of conductive film on said first layer of insulative film and in said first large opening, wherein said first layer of conductive film includes a first portion, said first portion residing in the first large opening so that said first portion does not contact either the upper surface of said first layer of insulative film or a portion of said first layer of conductive film that does contact the upper surface of said first layer of insulative film, said first portion having an upper surface which replicates the non-planar upper surface of said first alignment target to form a corresponding second alignment target having a non-planar upper surface;
(d) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface;
(e) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film;
and
(f) removing said second layer of insulative film to expose said second alignment target.

4 more elements

(a) forming a first layer of insulative film on the wafer, said first layer of insulative film having an upper surface;
(b) forming a first large opening relative to and around said first alignment target on said first layer of insulative film;
(c) depositing a first layer of conductive film on said first layer of insulative film and in said first large opening, wherein said first layer of conductive film includes a first portion, said first portion residing in said first large opening, said first portion having an upper surface which replicates the non-planar upper surface of said first alignment target to form a corresponding second alignment target having a non-planar upper surface;
(d) forming a patterned mask layer over said first layer of conductive film by depositing a layer of photoresist over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film;
(e) etching exposed portions of said first layer of conductive film through said patterned mask layer so that the first portion of said first layer of conductive film does not contact either the upper surface of said first layer of insulative film or a portion of said first layer of conductive film that does contact the upper surface of said first layer of insulative film;
(f) removing said patterned mask layer;
(g) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface;
(h) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film;
and
(i) removing said second layer of insulative film to expose said second alignment target.

7 more elements

A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a plurality of first alignment targets, each of the first alignment targets having a non-planar upper surface, the method comprising the steps of:

(a) forming a first layer of insulative film on the wafer;
(b) forming a plurality of first large openings, wherein each first large opening in the plurality of first large openings is formed relative to and around a corresponding one of the plurality of first alignment targets on said first layer of insulative film;
(c) depositing a first layer of conductive film on said first layer of insulative film and in said plurality of first large openings, wherein said first layer of conductive film includes a first portion, said first portion residing in said plurality of first large openings, said first portion having an upper surface which replicates the non-planar upper surface of each of the first alignment targets in said plurality of first alignment targets to form a corresponding plurality of second alignment targets, each second alignment target having a non-planar upper surface;
(d) forming a patterned mask layer over said first layer of conductive film by depositing a layer of photoresist over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film, wherein said patterned mask layer has a plurality of second openings therein in registry with said plurality of first large openings, each one of said plurality of second openings having an annular opening with solid center portions, said solid center portions being positioned to be located directly above a corresponding one of said plurality of first alignment targets;
(e) etching exposed portions of said first layer of conductive film through said patterned mask layer so that an island of said first layer of conductive film remains directly above each of the first alignment targets in said plurality of first alignment targets;
(f) removing said patterned mask layer;
(g) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface;
(h) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film;
and
(i) removing said second layer of insulative film to expose said plurality of second alignment targets.

7 more elements

Dependencies are inferred from the claim text.

Method for eliminating window mask process in the fabrication of a semiconductor wafer when chemical-mechanical polish planarization is used

Life of this patent

Method for eliminating window mask process in the fabrication of a semiconductor wafer when chemical-mechanical polish planarization is used

Life of this patent

Abstract

Claims28